Back to results
US 8,574,662 B2Granted
Substrate section for flexible display device, method of manufacturing substrate section, and method of manufacturing organic light emitting display device including substrate
AssigneeSamsung Display Co., Ltd.
InventorDong-Beom Lee
Life of this patent
Estimating the term…
Abstract
A substrate section for a flexible display device is disclosed. The substrate section prevents adhesion loss between a reinforcing layer and a barrier layer, thereby preventing a peel-off phenomenon between an inorganic barrier layer and a reinforcing layer.
Claims16
A method of manufacturing a substrate section for a flexible display device, the method comprising:
- preparing a first substrate configured to have at least one smooth surface;
- forming a reinforcing layer above the first substrate;
- forming a second substrate above the reinforcing layer, wherein the second substrate is configured to be flexible;
- forming a first barrier layer configured to cover a top surface of the second substrate, to surround side surfaces of the second substrate, and to contact the reinforcing layer, wherein the first barrier layer is formed using a first plasma enhanced chemical vapor deposition (PECVD) process;
- and
- forming a second barrier layer configured to be more dense than the first barrier layer, wherein the second barrier layer is formed using a second PECVD, and
- wherein an amount of silane (SiH4) gas used in the first PECVD process is less than an amount of SiH4 gas used in the second PECVD process.
4 more elements
A method of manufacturing an organic light emitting device, the method comprising:
- preparing a first substrate configured to have at least one smooth surface;
- forming a reinforcing layer above the first substrate;
- forming a second substrate above the reinforcing layer, wherein the second substrate is configured to be flexible;
- forming a first barrier layer configured to cover a top surface of the second substrate, surrounds side surfaces of the second substrate, and to contact the reinforcing layer;
- forming a second barrier layer above the first barrier layer, wherein the second barrier layer is configured to be more dense than the first barrier layer;
- forming an organic light emitter on the second barrier layer;
- forming an encapsulation layer for sealing the organic light emitter;
- and
- removing the first substrate and the reinforcing layer.
6 more elements
A method of manufacturing a substrate section for a flexible display device, the method comprising:
- preparing a first substrate configured to have at least one smooth surface;
- forming a reinforcing layer above the first substrate;
- forming a second substrate above the reinforcing layer, wherein the second substrate is configured to be flexible;
- forming a first barrier layer configured to cover a top surface of the second substrate, to surround side surfaces of the second substrate, and to contact the reinforcing laye;
- and
- forming a second barrier layer configured to be less dense than the first barrier layer,
- wherein each of the first barrier layer and the second barrier layer is formed by alternately stacking a silicon oxide (SiOx) layer and a silicon nitride (SiNx) layer.
4 more elements
Dependencies are inferred from the claim text.