Processing method and manufacturing method for optical component
AssigneeFUJIFILM Corporation
InventorYoshihisa Usami
Life of this patent
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Abstract
A processing method for a mold (1) to form a pattern of recessed portions (13) on a product forming surface (11) formed on the mold (1) includes a photoresist forming step in which a thermally deformable heat-mode photoresist layer (12) is formed on the product forming surface (11), a laser beam illumination step in which a laser beam is applied to the photoresist layer (12) by an exposure device incorporating a semiconductor laser to form a pattern of recessed portions (13), and an asperity forming step in which asperities are formed on the product forming surface (11) by making use of the pattern of recessed portions (13).
Claims16
A processing method for a mold, comprising:
- a photoresist forming step of forming a thermally deformable heat-mode photoresist layer on a product forming surface which includes a curved surface and which is formed on the mold, the photoresist layer containing a dye;
- a laser beam illumination step of applying a laser beam to the photoresist layer by an exposure device incorporating a semiconductor laser to form a pattern of recessed portions in the photoresist layer through thermal removal of a photoresist material of the photoresist layer, by heat produced through light absorption of the photoresist material of the photoresist layer caused by application of the laser beam, wherein the laser beam illumination step includes causing a relative curvilinear movement of at least one of a head emitting the laser beam and the mold to thereby move the head along the curved surface relative to the product forming surface, whereby the photoresist layer on the curved product forming surface is scanned with a dot-like spot of the laser beam;
- and
- an asperity forming step of forming asperities on the product forming surface by making use of the pattern of recessed portions.
Dependencies are inferred from the claim text.