Magnet mounting system and magnetron sputtering device having same
AssigneeHon Hai Precision Industry Co., Ltd.
InventorShao-Kai Pei
Life of this patent
Estimating the term…
Abstract
A magnetron sputtering device includes a main body and a magnet mounting system for receiving magnets. The magnet mounting system comprises a first annular member, a second annular member coaxially encasing the first member, a third annular member coaxially encasing the second member, a first driving device connected to the first annular member, a second driving device connected to the second annular member, and a third driving device connected to the third annular member. The first driving device, the second driving device, and the third driving device are respectively configured for driving the first annular member, the second annular member, and the third annular member to move along an axis of the first annular member.
Claims15
A magnetron sputtering device comprising:
- a main body;
- an external holder positioned on the outside of the main body;
- and
- a magnet mounting system comprising a first annular member and a first driving device mounted on the external holder;
- wherein the first annular member is positioned in the main body and connected to the first driving device, and the first driving device is configured for moving the first annular member along an axis of the first annular member;
- the magnetron sputtering device further comprises a second annular member and a second driving device, the second annular member coaxially encases the first annular member, the second driving device is mounted on the external holder and connected to the second annular member, and the second driving device is configured for moving the second annular member along the axis of the first annular member;
- the magnet mounting system further comprises a plurality of magnets, the magnets are received in the first and second annular members, the polarities of neighbored magnets received in the same annular member are opposite.
A magnet mounting system, comprising:
- a first annular member;
- a second annular member coaxially encasing the first member;
- a third annular member coaxially encasing the second member;
- a first driving device connected to the first annular member and configured for driving the first annular member to move along an axis of the first annular member;
- a second driving device connected to the second annular member and configured for driving the second annular member to move along the axis of the first annular member;
- and
- a third driving device connected to the third annular member and configured for driving the third annular member to move along the axis of the first annular member;
- a plurality of magnets, the magnets received in the first, second, and third annular members, wherein the polarities of neighbored magnets received in the same annular member are opposite.
Dependencies are inferred from the claim text.