Back to results
US 8,573,956 B2Granted
Multiple stage dry pump
AssigneeUlvac, Inc.
InventorToshio Suzuki
Life of this patent
Estimating the term…
Abstract
A dry pump includes: a plurality of cylinders; a pump chamber formed in each of the cylinders; a division wall separating pump chambers adjacent to each other; a plurality of rotors contained inside pump chambers; a rotating shaft that serves as an axis of rotation of the rotor; and a cooling medium path which is formed inside the division wall and through which a cooling medium passes.
Claims4
A dry pump comprising:
- a plurality of cylinders;
- a pump chamber formed in each of the cylinders;
- a division wall separating pump chambers adjacent to each other;
- a plurality of rotors contained inside pump chambers;
- a rotating shaft that serves as an axis of rotation of the rotor;
- and
- a cooling medium path which is formed at least inside the division wall separating at least the pump chamber positioned at a highest-pressure side in a plurality of the pump chambers in which inner pressures thereof are different from each other and through which a cooling medium passes,
- wherein a region on which the cooling path is formed is decreased in incremental steps toward the division wall separating the pump chamber positioned at a lowest-pressure side from the division wall separating the pump chamber positioned at a highest-pressure side.
5 more elements
A dry pump comprising:
- a plurality of cylinders;
- a pump chamber formed in each of the cylinders;
- a division wall separating pump chambers adjacent to each other;
- a plurality of rotors contained inside pump chambers;
- a rotating shaft that serves as an axis of rotation of the rotor;
- and
- a cooling medium path formed inside the division wall separating the pump chamber positioned at a highest-pressure side in a plurality of the pump chambers in which inner pressures thereof are different from each other and through which a cooling medium passes,
- wherein the cooling medium path is not drawn inside the division wall other than that separating the pump chamber positioned at a highest-pressure side, and passes only through a peripheral portion of a center cylinder.
5 more elements
Dependencies are inferred from the claim text.