Methods and apparatus of manufacturing micro and nano-scale features
AssigneeNorth Carolina Agricultural and Technical State University
InventorSalil Desai
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Abstract
The present invention provides methods of generating scalable patterned features on a substrate. The methods includes ejecting a succession of droplets; applying a force to the droplets in a manner such that the droplets travel along a designated path; altering the properties of one or more of the droplets in a manner so as to adjust the size of the droplets; and depositing the droplets on the substrate to generate patterned features on the substrate. The present invention also provides apparatuses for generating scalable patterned features on a substrate.
Claims26
A method of generating scalable patterned features on a substrate, said method comprising:
- (a) ejecting a succession of droplets, comprising selectively applying a first force to a stream of fluid such that the stream breaks into the succession of droplets;
- (b) applying a second force to the droplets in a manner such that the droplets travel along a designated path, comprising passing the droplets through a charge tunnel and a quadrupole mechanism;
- (c) reducing the size of one or more of the droplets;
- and
- (d) depositing the droplets on the substrate to generate patterned features on the substrate.
Dependencies are inferred from the claim text.