Back to results
US 8,573,755 B2Granted
Liquid-ejecting head, liquid-ejecting apparatus, and piezoelectric element
AssigneeSeiko Epson Corporation
InventorMasahisa Nawano
Life of this patent
Estimating the term…
Abstract
A piezoelectric element comprising a first electrode, a piezoelectric layer which includes bismuth, lanthanum iron, and manganese and which formed above the first electrode and a second electrode formed above the piezoelectric layer. The integrated intensity of a diffraction peak observed at 20°<2θ<25° is 90% or more of the sum of the integrated intensities of diffraction peaks observed at 20°<2θ<50° in an X-ray powder diffraction pattern of the piezoelectric layer measured at φ=Φ=0°.
Claims9
A piezoelectric element comprising:
- a first electrode,
- a piezoelectric layer which includes bismuth, lanthanum iron, and manganese and which formed above the first electrode;
- and
- a second electrode formed above the piezoelectric layer,
- wherein the integrated intensity of a diffraction peak observed at 20°<2θ<25° is 90% or more of the sum of the integrated intensities of diffraction peaks observed at 20°<2θ<50° in an X-ray powder diffraction pattern of the piezoelectric layer measured at φ=Φ=0°.
2 more elements
Dependencies are inferred from the claim text.