Methods for manufacturing liquid ejecting head and piezoelectric element, liquid ejecting head, liquid ejecting apparatus, and piezoelectric element

A method for manufacturing a liquid ejecting head comprising a pressure generating chamber communicating with a nozzle aperture and a piezoelectric element allowing the pressure generating chamber to change pressure, the method comprising:

• forming a titanium film comprising titanium;
• forming a platinum film comprising platinum on the titanium film;
• forming a piezoelectric precursor film comprising bismuth, lanthanum, iron, and manganese on the platinum film;
• crystallizing the piezoelectric precursor film to form a piezoelectric layer by firing the piezoelectric precursor film in an atmosphere of an inert gas;
• and
• forming an electrode on the piezoelectric layer.

A piezoelectric element comprising:

• a first electrode including comprising:
• a first titanium oxide layer comprising titanium oxide
• a platinum layer comprising platinum, formed above the first titanium oxide layer;
• and
• a second titanium oxide layer comprising titanium oxide, formed above the platinum layer;
• a piezoelectric layer comprising bismuth, lanthanum, iron, and manganese, which is formed above the second titanium oxide layer;
• and
• a second electrode formed above the piezoelectric layer.