Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus
AssigneeSeiko Epson Corporation
InventorsKoichi Morozumi, Toshiki Hara, Jiro Kato, Satoshi Denda
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Abstract
A piezoelectric element includes a first conductive layer, a second conductive layer disposed to face the first conductive layer, and a piezoelectric layer disposed between the first conductive layer and the second conductive layer and composed of a compound oxide containing at least lead, zirconium, titanium, and oxygen. The piezoelectric layer includes a lead concentration gradient region in which the lead concentration increases from the first conductive layer side to the second conductive layer side. The lead concentration gradient region is disposed on the first conductive layer side of the piezoelectric layer.
Claims7
A piezoelectric element comprising:
- a first conductive layer;
- a second conductive layer disposed to face the first conductive layer;
- and
- a piezoelectric layer disposed between the first conductive layer and the second conductive layer and composed of a compound oxide containing at least lead, zirconium, titanium, and oxygen,
- wherein the piezoelectric layer includes a lead concentration gradient region in which the lead concentration increases from the first conductive layer side to the second conductive layer side;
- and
- the lead concentration gradient region is disposed on the first conductive layer side of the piezoelectric layer,
- wherein the lead concentration in the piezoelectric layer is measured using a relative sensitivity factor determined by both Rutherford backscattering spectroscopy and Auger electron spectroscopy.
A piezoelectric element comprising:
- a first conductive layer;
- a second conductive layer disposed to face the first conductive layer, wherein the first conductive layer is formed to have a larger planer area than the second conductive layer;
- and
- a piezoelectric layer disposed between the first conductive layer and the second conductive layer and composed of a compound oxide containing at least lead, zirconium, titanium, and oxygen,
- wherein the piezoelectric layer includes two lead concentration gradient regions in which the lead concentration increases from the first conductive layer side to the second conductive layer side;
- and
- one of the lead concentration gradient regions is disposed on the first conductive layer side of the piezoelectric layer, and the other lead concentration gradient region is disposed on the second conductive layer side of the piezoelectric layer such that piezoelectric layer is disposed between the first and second lead concentration gradient regions,
- wherein the lead concentration in the piezoelectric layer is measured using a relative sensitivity factor determined by both Rutherford backscattering spectroscopy and Auger electron spectroscopy.
Dependencies are inferred from the claim text.