US 8,573,579 B2 · Biasing a pre-metalized non-conductive substrate

Abstract

Methods and apparatus are provided for static-biasing a pre-metalized non-conductive substrate within a process chamber. A substrate holder that holds a pre-metalized non-conductive substrate is engaged by a lift mechanism that provides movement of the substrate in a first, upward direction to a contact position within the process chamber and in a second direction to a non-contact position. When the substrate holder is moved to the contact position, the substrate electrically engages a conductive spring-loaded compliance mechanism that is mounted in a fixed position within the process chamber. The spring-loaded compliance mechanism is connected to a bias-voltage feed-through for the process chamber that applies a bias voltage to the substrate via the spring-loaded compliance mechanism.

Claims20

Dependent claims

An apparatus comprising:

a substrate holder adapted for holding a pre-metalized non-conductive substrate;
a conductive spring-loaded compliance mechanism connected to a bias voltage, wherein the conductive spring-loaded compliance mechanism is operable to apply the bias voltage to the substrate when the substrate is brought into contact with the conductive spring-loaded compliance mechanism;
and
a lift mechanism, wherein
the lift mechanism is operable to move the substrate holder in a first direction to bring the substrate into contact with the spring-loaded compliance mechanism, thereby connecting the spring-loaded compliance mechanism through the substrate to the lift mechanism, and
the lift mechanism is operable to move the substrate holder in a second direction to disconnect the substrate from the spring-loaded compliance mechanism, thereby disconnecting the spring loaded compliance mechanism from the lift mechanism through the substrate.

3 more elements

Dependencies are inferred from the claim text.

Biasing a pre-metalized non-conductive substrate

Life of this patent

Biasing a pre-metalized non-conductive substrate

Life of this patent

Abstract

Claims20