Vacuum control valve and vacuum control system
AssigneeCkd Corporation
InventorsHiroshi Itafuji, Masayuki Kouketsu
Life of this patent
Estimating the term…
Abstract
The invention provides a vacuum control valve configured to control the vacuum pressure in the vacuum chamber. The vacuum control valve includes a control valve main body, an operation unit, a cylinder, a biasing unit, and a bellofram. The operation unit and the cylinder include a valve opening manipulation chamber and a shutoff load generation chamber. The shutoff load generation chamber is configured to have a common axial center line with the valve opening manipulation chamber and to generate a load applied to the operation unit in a direction for reducing the lift in accordance with a supply of the working fluid. And the shutoff load generation chamber may be formed in an interior of the rod.
Claims16
A vacuum control valve connected between a vacuum chamber and a vacuum pump and configured to control the vacuum pressure in the vacuum chamber by manipulating valve opening using working fluid, the vacuum control valve comprising:
- a control valve main body comprising a flow passage and a valve seat formed in the flow passage, the flow passage connecting the vacuum chamber and the vacuum pump;
- an operation unit comprising a valve body, a piston, and a rod that joins the valve body and the piston, the valve body being configured to manipulate the valve opening by adjusting a lift that is a distance between the valve body and the valve seat and to block the flow passage by contacting the valve seat;
- a cylinder configured to house the piston, a first side of the cylinder being connected to the control valve main body;
- a head cover attached to the cylinder so as to cover an edge portion of the cylinder on a second side of the cylinder opposite to the first side;
- a biasing unit configured to press the operation unit in a direction for reducing the lift;
- and
- a bellofram configured to seal a gap between an outer peripheral surface of the piston and an inner peripheral surface of the cylinder following a movement of the piston, wherein
- the operation unit and the cylinder include:
- a valve opening manipulation chamber sealed by the bellofram, the valve opening manipulation chamber having a tubular shape surrounding the rod and being configured to generate a load applied to the piston in a direction for increasing the lift in accordance with a pressure exerted by the working fluid;
- and
- a shutoff load generation chamber formed inside the rod, the shutoff load generation chamber having a common axial center line with the valve opening manipulation chamber and being configured to generate a load applied to the operation unit in a direction for reducing the lift in accordance with a supply of the working fluid,
- the vacuum control valve further comprising:
- a sliding convex portion provided on the head cover and slidably accommodated in the shutoff load generation chamber, the sliding convex portion guiding a movement of the rod by sliding along an inner peripheral surface of the shutoff load generation chamber;
- a sealing unit provided to seal between the shutoff load generation chamber and the sliding convex portion;
- and
- a flow passage configured to supply the working fluid to the shutoff load generation chamber.
A vacuum control valve connected between a vacuum chamber and a vacuum pump and configured to control the vacuum pressure in the vacuum chamber by manipulating valve opening using working fluid, the vacuum control valve comprising:
- a control valve main body comprising a flow passage and a valve seat formed in the flow passage, the flow passage connecting the vacuum chamber and the vacuum pump;
- an operation unit comprising a valve body, a piston, and a rod that joins the valve body and the piston, the valve body being configured to manipulate the valve opening by adjusting a lift that is a distance between the valve body and the valve seat and to block the flow passage by contacting the valve seat;
- a cylinder connected to the control valve main body and housing the piston;
- a biasing unit configured to press the operation unit in a direction for reducing the lift;
- and
- a bellofram configured to seal a gap between an outer peripheral surface of the piston and an inner peripheral surface of the cylinder following a movement of the piston, wherein
- the operation unit and the cylinder include:
- a valve opening manipulation chamber sealed by the bellofram, the valve opening manipulation chamber having a tubular shape surrounding the rod and being configured to generate a load applied to the piston in a direction for increasing the lift in accordance with a pressure exerted by the working fluid;
- and
- a shutoff load generation chamber having a common axial center line with the valve opening manipulation chamber and being configured to generate a load applied to the operation unit in a direction for reducing the lift in accordance with a supply of the working fluid,
- the cylinder includes a head cover comprising a sliding convex portion accommodated in the shutoff load generation chamber, and
- the vacuum control valve includes a sealing unit having a sealing surface sealing between the shutoff load generation chamber and the sliding convex portion, the sealing surface applying a surface pressure increasing according to the supply of the working fluid to the shutoff load generation chamber.
A vacuum control valve connected between a vacuum chamber and a vacuum pump and configured to control the vacuum pressure in the vacuum chamber by manipulating valve opening using working fluid, the vacuum control valve comprising:
- a control valve main body comprising a flow passage and a valve seat formed in the flow passage, the flow passage connecting the vacuum chamber and the vacuum pump;
- an operation unit comprising a valve body, a piston, and a rod that joins the valve body and the piston, the valve body being configured to manipulate the valve opening by adjusting a lift that is a distance between the valve body and the valve seat and to block the flow passage by contacting the valve seat;
- a cylinder configured to house the piston, a first side of the cylinder being connected to the control valve main body;
- a biasing unit configured to press the operation unit in a direction for reducing the lift;
- and
- a bellofram configured to seal a gap between an outer peripheral surface of the piston and an inner peripheral surface of the cylinder following a movement of the piston, wherein
- the operation unit and the cylinder include:
- a valve opening manipulation chamber sealed by the bellofram, the valve opening manipulation chamber having a tubular shape surrounding the rod and being configured to generate a load applied to the piston in a direction for increasing the lift in accordance with a pressure exerted by the working fluid;
- and
- a shutoff load generation chamber formed inside the rod, the shutoff load generation chamber having a common axial center line with the valve opening manipulation chamber and being configured to generate a load to be applied to the operation unit in a direction for reducing the lift in accordance with a supply of the working fluid.
Dependencies are inferred from the claim text.