Apparatus and method for ultrasonic wet treatment of plate-like articles
AssigneeLam Research Corporation
InventorsRainer Obweger, Alexander Lippert, Harry Sax
Life of this patent
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Abstract
Disclosed is a method and a respective apparatus for ultrasonic wet treatment of a plate-like article, which comprises: bringing a solid element, which is connected to a transducer in close proximity to a surface of a plate-like article so that a gap is formed between the solid element and the plate-like article, the gap having a distance d2 between 0.1 mm and 5 mm, dispensing liquid for filling the gap between the solid element and the plate-like article, and detecting ultrasonic waves and/or controlling the distance d2, by measuring the distance d2, comparing the measured distance with a desired distance d0 and adjusting the distance accordingly.
Claims20
An apparatus for ultrasonic wet treatment of a plate-like article, comprising:
- a solid element connected to a transducer for treating the plate-like article with ultrasonic energy wherein a gap is formed between the solid element and the plate-like article, the gap having a distance d2 between 0.1 mm and 15 mm, the gap being configured to be changed and adjusted during the treatment;
- liquid dispensing means for introducing liquid into the gap between the solid element and the plate-like article when being treated;
- and
- an ultrasonic detector configured for measuring ultrasonic waves, the ultrasonic detector being an ultrasonic transducer.
An apparatus for ultrasonic wet treatment of a plate-like article, comprising:
- a solid element connected to a transducer for treating the plate-like article with ultrasonic energy wherein a gap is formed between the solid element and the plate-like article, the gap having a distance d2 between 0.1 mm and 15 mm, the gap being configured to be changed and adjusted during the treatment;
- liquid dispensing means for introducing liquid into the gap between the solid element and the plate-like article when being treated;
- an ultrasonic detector configured for measuring ultrasonic waves, the ultrasonic detector being an ultrasonic transducer;
- and
- means for controlling the distance d2, the means for controlling the distance comprising means for measuring the distance d2, means for comparing the measured distance with a desired distance d0 and distance adjusting means for adjusting the distance accordingly.
Dependencies are inferred from the claim text.