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US 8,573,058 B2Granted
Acceleration sensor and electronic device
AssigneeSeiko Epson Corporation
InventorMasahiro Oshio
Life of this patent
Estimating the term…
Abstract
An acceleration sensor includes: a support member; a fixed electrode provided on the support member; a movable unit; a movable electrode provided on the movable unit and disposed opposed to the fixed electrode to generate capacity; and a projection extending from the opposed surface of at least either the fixed electrode or the movable electrode in one direction within the surface.
Claims18
An acceleration sensor comprising:
- a support member;
- a fixed electrode extending from a first base of the support member in a first direction, the fixed electrode being in the form of an arm;
- a movable unit;
- a movable electrode extending from a second base of the movable unit in a second direction opposite to the first direction and disposed opposite to the fixed electrode across a gap, the movable electrode being in the form of an arm;
- an elastically deformable connection member connecting the support member and the movable unit;
- the fixed electrode has an opposite surface opposite to the movable electrode;
- and
- a projection formed at the opposite surface of the fixed electrode, wherein
- a first tip of the fixed electrode is adjacent to the movable unit,
- the projection is continuously formed from the first base to the first tip in the first direction,
- the projection is projected from the opposite surface toward the movable electrode, and
- a first width of the fixed electrode where the projection is formed, in a width direction perpendicular to the first direction is larger than a second width of the fixed electrode, where the projection is not formed, in the width direction.
9 more elements
An acceleration sensor comprising:
- a support member;
- a fixed electrode extending from a first base of the support member in a first direction, the fixed electrode being in the form of an arm;
- a movable unit;
- a movable electrode extending from a second base of the movable unit in a second direction opposite to the first direction and disposed opposite to the fixed electrode across a gap, the movable electrode being in the form of an arm;
- an elastically deformable connection member connecting the support member and the movable unit;
- the movable electrode has an opposite surface opposite to the fixed electrode;
- and
- a projection formed at the opposite surface of the movable electrode, wherein
- a first tip of the movable electrode is adjacent to the support member,
- the projection is continuously formed from the second base to the first tip in the second direction,
- the projection is projected from the opposite surface toward the fixed electrode, and
- a first width of the movable electrode, where the projection is formed, in a width direction perpendicular to the second direction is larger than a second width of the movable electrode, where the projection is not formed, in the width direction.
9 more elements
Dependencies are inferred from the claim text.