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US 8,573,052 B2Granted
Capacitive humidity sensor and manufacturing method
AssigneeKorea Electronics Technology Institute
InventorsSung Min Hong, Kun Nyun Kim, Young Chang Jo, Won Hyo Kim
Life of this patent
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Abstract
A capacitive humidity sensor, and more particularly, to a capacitive humidity sensor and a manufacturing method thereof capable of increasing reliability of the sensor by forming a dehumidification layer of a polymer material having a large surface area between a lower electrode layer and an upper electrode layer while miniaturizing the humidity sensor by forming a sensor unit on an ROIC substrate.
Claims11
A capacitive humidity sensor, comprising:
- an ROIC substrate that includes an electrode pad;
- a metal layer that is formed on the ROIC substrate and patterned to partially expose the electrode pad;
- an insulating layer that is formed on the metal layer and patterned to partially expose the electrode pad;
- a lower electrode layer that is formed on the insulating layer;
- a dehumidification layer formed on the lower electrode layer that is etched so as to expand its surface area;
- an upper electrode formed on the dehumidification layer;
- and
- a connection layer that is formed on the exposed electrode pad and contacts each of the lower electrode layer and the upper electrode layer with the electrode pad.
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A manufacturing method of a capacitive humidity sensor, the method comprising:
- forming a metal layer on an ROIC substrate including an electrode pad;
- forming an insulating layer on the metal layer;
- patterning the insulating layer and the metal layer to partially expose the electrode pad;
- forming a lower electrode layer on the insulating layer;
- forming a dehumidification layer on the lower electrode layer;
- forming and patterning an upper electrode layer on the dehumidification layer;
- and
- etching the dehumidification layer by using the patterned upper electrode layer as a mask.
5 more elements
Dependencies are inferred from the claim text.