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US 8,572,988 B2Granted
Cold trap and vacuum evacuation apparatus
AssigneeSumitomo Heavy Industries, Ltd.
InventorHidekazu Tanaka
Life of this patent
Estimating the term…
Abstract
A cold trap includes a refrigerator and a cold panel that is thermally connected with the refrigerator to be cooled. A rough surface is formed on the cold panel. The cold trap is arranged, for example, in an evacuation channel for connecting a vacuum chamber with a turbo-molecular pump in order to freeze and capture, on a surface thereof, part of a gas that is to be sucked and pumped into the turbo-molecular pump from the vacuum chamber through the evacuation channel.
Claims5
A cold trap comprising:
- a refrigerator;
- and
- a cold panel that is thermally connected with the refrigerator to be cooled,
- wherein a rough surface is formed on the cold panel,
- wherein the rough surface is formed by performing matte plating on a substrate of the cold panel.
2 more elements
A cold trap comprising:
- a refrigerator;
- and
- a cold panel that is thermally connected with the refrigerator to be cooled,
- wherein a rough surface is formed on the cold panel,
- wherein the rough surface is formed on a surface of the cold trap, the surface that faces a volume to be evacuated.
2 more elements
A cold trap comprising:
- a refrigerator;
- and
- a cold panel that is thermally connected with the refrigerator to be cooled,
- wherein a rough surface is formed on the cold panel,
- wherein the rough surface is such that a second surface roughness is formed on a surface having a first surface roughness, the second surface roughness smaller than the first surface roughness.
2 more elements
A vacuum evacuation apparatus comprising:
- a vacuum pump;
- and
- a cold trap that is arranged in an evacuation channel for connecting a volume to be evacuated with the vacuum pump and that freezes and captures, on a surface thereof, at least part of a gas that is to be sucked and pumped into the vacuum pump from the volume to be evacuated through the evacuation channel,
- wherein the cold trap includes a cold panel exposedly arranged in the evacuation channel and a refrigerator that is thermally connected with the cold panel to cool the cold panel,
- wherein a rough surface is formed on the cold panel.
2 more elements
Dependencies are inferred from the claim text.