# US 8,572,519 B2 · Method and apparatus for reducing implant topography reflection effect > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,572,519 B2 - Document ID: US8572519B2 - Status: Granted - Kind: B2 - Application number: 12/758,147 - Filed: 2010-04-12 - Published: 2011-10-13 - Granted: 2013-10-29 - Earliest claimed: 2010-04-12 - Assignees: Taiwan Semiconductor Manufacturing Company, Ltd. - Applicants: Wen Hao Liu; Hsien-Huang Liao; Chi-Cheng Hung; Wen-Chun Huang; Ru-Gun Liu - Inventors: Wen Hao Liu; Hsien-Huang Liao; Chi-Cheng Hung; Wen-Chun Huang; Ru-Gun Liu - Web page: https://patentgrep.com/patent/US8572519B2 ## CPC - G03F 1/36: Masks having proximity correction features; Preparation thereof, e.g. optical proximity correction [OPC] design processes - G03F 1/70: Adapting basic layout or design of masks to lithographic process requirements, e.g., second iteration correction of mask patterns for imaging - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract Embodiments of the present disclosure provide methods and apparatuses for integrated circuits. An exemplary integrated circuit (IC) method includes providing an IC design layout that includes a design feature; determining a dimensional difference between the design feature and a corresponding developed photoresist feature of a photoresist layer; modifying the CD of the design feature to compensate for the difference, thereby generating a modified IC design layout; and making a mask using the modified IC design layout. ## Claims ### Claim 1 A method comprising: determining a total light intensity exposure for a portion of a photoresist layer, wherein determining the total light intensity exposure for the portion of the photoresist layer includes determining a masked light intensity component and a reflected light intensity component; and creating, by a computer, an optical proximity correction (OPC) model that uses the total light intensity exposure to identify a feature of an IC design layout that requires a local bias to compensate for a difference between a critical dimension (CD) of the feature of the IC design layout and a CD of a corresponding feature of the photoresist layer, wherein the OPC model identifies the difference by the reflected light intensity component exceeding a predetermined threshold. ### Claim 2 (depends on 1) The method of claim 1, wherein determining the total light intensity exposure further comprises: determining a product of the masked light intensity component and a reflection ratio, wherein the reflection ratio is determined using at least one of a pattern density of a topography layer, a reflection index of the photoresist layer, and a reflection index of the topography layer. ### Claim 3 (depends on 1) The method of claim 1, further comprising: providing CD data related to a wafer produced using the layout design, the wafer having a plurality of features; and performing a regression analysis using the CD data to tune the OPC model. ### Claim 4 (depends on 3) The method of claim 3, wherein performing the regression analysis using the CD data to tune the OPC model comprises tuning the OPC model using after-development-inspection (ADI) data related to the wafer. ### Claim 5 (depends on 1) The method of claim 1, wherein determining the total light intensity exposure for a portion of the photoresist layer further comprises using a reflection model to determine at least one of the masked light intensity and the reflected light intensity. ### Claim 6 (depends on 1) The method of claim 1, wherein the reflected light intensity component is determined using an integration model. ### Claim 7 (depends on 1) The method of claim 1, wherein determining the reflected light intensity component includes determining an intensity of light reflected by a material layer formed below the portion of photoresist layer, and wherein the OPC model identifies the difference based on the intensity of the light reflected by the material layer formed below the portion of photoresist layer exceeding the predetermined threshold. ### Claim 8 An apparatus having a non-transitory computer-readable medium, the non-transitory computer-readable medium having instructions executable by a processor, the instructions comprising: instructions that determine a total light intensity exposure for a portion of a photoresist layer, wherein determining the total light intensity exposure for the portion of the photoresist layer includes determining a masked light intensity component and a reflected light intensity component; and instructions that create an optical proximity correction (OPC) model that uses the total light intensity exposure to identify a feature of an IC design layout that requires a local bias to compensate for a difference between a critical dimension (CD) of the feature of the IC design layout and the CD of a corresponding feature of the photoresist layer, wherein the OPC model identifies the difference by the reflected light intensity component exposure exceeding a predetermined threshold. ### Claim 9 (depends on 8) The apparatus of claim 8, wherein the instructions that create the OPC model using the total light intensity exposure comprise: instructions that determine a product of the masked light intensity component and a reflection ratio, wherein the reflection ratio is calculated using at least one of a pattern density of a topography layer, a reflection index of the photoresist layer, and a reflection index of the topography layer. ### Claim 10 (depends on 8) The apparatus of claim 8, wherein the instructions that create an OPC model using the total light intensity exposure comprise: instructions that provide critical dimension (CD) data related to a wafer produced using the IC design layout, the wafer having a plurality of features; instructions that perform a regression analysis using the CD data to tune the OPC model. ### Claim 11 (depends on 10) The apparatus of claim 10, wherein instructions that perform a regression analysis using the CD data to tune the OPC model comprise instructions that tune the OPC model using after-development-inspection (ADI) data related to the wafer. ### Claim 12 (depends on 10) The apparatus of claim 10, wherein instructions that determine the total light intensity exposure for a portion of a photoresist layer further comprise instructions that use a reflection model to determine at least one of the masked light intensity and the reflected light intensity. ### Claim 13 (depends on 8) The apparatus of claim 8, wherein the instructions further comprise instructions that determine the reflected light intensity component using an integration model. ### Claim 14 A method comprising: determining a total light intensity exposure for a portion of a photoresist layer, wherein determining the total light intensity exposure for the portion of the photoresist layer includes determining a masked light intensity component and a reflected light intensity component; and creating, by a computer, an optical proximity correction (OPC) model that determines whether the reflected light intensity component for the portion of the photoresist layer exceeds a predetermined value thereby causing a difference in a critical dimension (CD) of a feature of the IC design layout and a CD of a corresponding feature of the photoresist layer. ### Claim 15 (depends on 14) The method of claim 14, wherein the portion of the photoresist layer includes a reversed region, the reversed region being a region of the photoresist layer exposed by the reflected light intensity component above the predetermined value. ### Claim 16 (depends on 14) The method of claim 14, wherein the OPC model identifies the feature of the IC design layout as requiring a local bias to compensate when the OPC model determines that the reflected light intensity component striking the portion of the photoresist layer during exposure exceeds the predetermined value. ### Claim 17 (depends on 14) The method of claim 14, further comprising tuning the OPC model using after-development-inspection (ADI) data. ### Claim 18 The method of 14, wherein determining the total light intensity exposure further comprises determining a product of the masked light intensity component and a reflection ratio, and wherein the reflection ratio is determined using a pattern density of a topography layer, a reflection index of the photoresist layer, and a reflection index of the topography layer. ### Claim 19 The method of 14, further comprising: providing CD data related to a wafer produced using the IC design layout; and performing a regression analysis using the CD data to tune the OPC model. ### Claim 20 The method of 19, wherein performing the regression analysis using the CD data to tune the OPC model comprises tuning the OPC model using after-development-inspection (ADI) data related to the wafer.