# US 8,570,705 B2 · MEMS sprung cantilever tunable capacitors and methods > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,570,705 B2 - Document ID: US8570705B2 - Status: Granted - Kind: B2 - Application number: 13/007,255 - Filed: 2011-01-14 - Published: 2011-07-21 - Granted: 2013-10-29 - Earliest claimed: 2010-01-15 - Assignees: Wispry, Inc. - Applicants: Dana DeReus - Inventors: Dana DeReus - Web page: https://patentgrep.com/patent/US8570705B2 ## CPC - H01G 5/18: due to change in inclination, e.g. by flexing, by spiral wrapping - B81B 3/007: {For controlling stiffness, e.g. ribs} - H02N 1/006: {of the gap-closing type (H02N1/004 takes precedence)} - B81B 2201/014: having a cantilever fixed on one side connected to one or more dimples - H01G: CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE (selection of specified materials as dielectric H01B3/00; capacitors having potential barriers H10D1/62, H10K10/10) - B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00) - H02N: ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ## Abstract The present subject matter relates to MEMS tunable capacitors and methods for operating such capacitors. The tunable capacitor can feature a primary stationary actuator electrode on a substrate, a secondary stationary actuator electrode on the substrate, a stationary RF signal capacitor plate electrode on the substrate, a sprung cantilever disposed over the substrate, a beam anchor connecting a first end of the sprung cantilever to the substrate, and one or more elastic springs or other biasing members connecting a second end of the sprung cantilever to the substrate, the second end being located distally from the first end. The spring cantilever can be movable between an OFF state defined by the potential difference between the stationary and moveable actuator electrodes being zero, and an ON state defined by a non-zero potential difference between the stationary and moveable actuator electrodes. ## Claims ### Claim 1 A MEMS tunable capacitor comprising: a primary stationary actuator electrode on a substrate; a secondary stationary actuator electrode on the substrate; a stationary RF signal capacitor plate electrode on the substrate; a sprung cantilever disposed over the substrate, the sprung cantilever comprising: a primary movable actuator electrode positioned over the primary stationary actuator electrode; a secondary movable actuator electrode positioned over the secondary stationary actuator electrode; a RF signal path that is electrically isolated from the primary movable actuator electrode and the secondary movable actuator electrode; and a movable RF signal capacitor plate in communication with the RF signal path and positioned over the stationary RF signal capacitor plate electrode; a beam anchor connecting a first end of the sprung cantilever to the substrate; and one or more elastic springs or other biasing members connecting a second end of the sprung cantilever to the substrate, the second end being located distally from the first end; wherein the sprung cantilever is movable between an OFF state defined by the potential difference between the stationary and moveable actuator electrodes being zero, and an ON state defined by a non-zero potential difference between the stationary and moveable actuator electrodes. ### Claim 2 (depends on 1) The MEMS tunable capacitor of claim 1, wherein the sprung cantilever is separated from the substrate by an air gap. ### Claim 3 (depends on 2) The MEMS tunable capacitor of claim 2, wherein the air gap is about 2 μm wide. ### Claim 4 (depends on 1) The MEMS tunable capacitor of claim 1, wherein the RF signal path is electrically isolated from the primary movable actuator electrode and the secondary movable actuator electrode. ### Claim 5 (depends on 1) The MEMS tunable capacitor of claim 1, wherein the RF signal path is routed onto the sprung cantilever at the first end of the sprung cantilever. ### Claim 6 (depends on 1) The MEMS tunable capacitor of claim 1, wherein the stationary RF signal capacitor plate and the movable RF signal capacitor plate are each shaped to facilitate packing density and capacitance density. ### Claim 7 (depends on 6) The MEMS tunable capacitor of claim 6, wherein the stationary RF signal capacitor plate and the movable RF signal capacitor plate each have a shape selected from one of a rectangle, a hexagon, or an octagon. ### Claim 8 (depends on 1) The MEMS tunable capacitor of claim 1, wherein one or both of a shape or size of the stationary RF signal capacitor plate is substantially similar to a shape or size of the movable RF signal capacitor plate. ### Claim 9 (depends on 1) The MEMS tunable capacitor of claim 1, wherein one or both of a shape or size of the stationary RF signal capacitor plate is different than a shape or size of the movable RF signal capacitor plate. ### Claim 10 (depends on 1) The MEMS tunable capacitor of claim 1, wherein the elastic spring is connected to the sprung cantilever at the second end of the sprung cantilever. ### Claim 11 (depends on 1) The MEMS tunable capacitor of claim 1, wherein the elastic spring is connected to the sides of the sprung cantilever near the second end of the sprung cantilever. ### Claim 12 (depends on 1) The MEMS tunable capacitor of claim 1, wherein the elastic spring is selected from the group comprising a box spring, a folded spring, and an x-spring. ### Claim 13 (depends on 1) The MEMS tunable capacitor of claim 1, wherein the elastic spring is relatively stiffer in a vertical out-of-plane direction and relatively more compliant in an in-plane longitudinal direction. ### Claim 14 (depends on 1) The MEMS tunable capacitor of claim 1, wherein in the OFF state the potential difference is zero both between the primary stationary actuator electrode and the primary moveable actuator electrode and between the secondary stationary actuator electrode and the secondary moveable actuator electrode. ### Claim 15 (depends on 1) The MEMS tunable capacitor of claim 1, wherein in the ON state the potential difference between the primary stationary actuator electrode and the primary moveable actuator electrode is substantially the same as the potential difference between the secondary stationary actuator electrode and the secondary moveable actuator electrode. ### Claim 16 (depends on 1) The MEMS tunable capacitor of claim 1, wherein in the ON state the potential difference between the primary stationary actuator electrode and the primary moveable actuator electrode is different than the potential difference between the secondary stationary actuator electrode and the secondary moveable actuator electrode. ### Claim 17 (depends on 1) The MEMS tunable capacitor of claim 1, wherein the sprung cantilever comprises one or more through beam slots. ### Claim 18 (depends on 17) The MEMS tunable capacitor of claim 17, wherein the through beam slots are positioned between the movable RF signal capacitor plate and either or both of the primary movable actuator electrode or the secondary movable actuator electrode. ### Claim 19 (depends on 17) The MEMS tunable capacitor of claim 17, wherein the through beam slots are positioned between the RF signal path and the movable RF signal capacitor plate and either or both of the primary movable actuator electrode or the secondary movable actuator electrode. ### Claim 20 (depends on 1) The MEMS tunable capacitor of claim 1, comprising one or more isolation stand-off bumps positioned between the substrate and the sprung cantilever. ### Claim 21 (depends on 20) The MEMS tunable capacitor of claim 20, wherein the isolation stand-off bumps are positioned on one or more of the primary stationary actuator electrode and the secondary stationary actuator electrode. ### Claim 22 A MEMS tunable capacitor comprising: a primary stationary actuator electrode deposited on a substrate; a secondary stationary actuator electrode deposited on the substrate; a stationary RF signal capacitor plate electrode deposited on the substrate; a sprung cantilever suspended over the substrate, the sprung cantilever being separated from the substrate by an air gap, the sprung cantilever comprising: a primary movable actuator electrode positioned over the primary stationary actuator electrode; a secondary movable actuator electrode positioned over the secondary stationary actuator electrode; a RF signal path that is electrically isolated from the primary movable actuator electrode and the secondary movable actuator electrode; and a movable RF signal capacitor plate in communication with the RF signal path and positioned over the stationary RF signal capacitor plate electrode; a beam anchor connecting a first end of the sprung cantilever to the substrate; and one or more elastic springs or other biasing members connecting a second end of the sprung cantilever to the substrate, the second end being located distally from the first end; wherein the sprung cantilever is movable between an OFF state defined by the potential difference between the stationary and moveable actuator electrodes being zero, and an ON state defined by a non-zero potential difference between the stationary and moveable actuator electrodes. ### Claim 23 A method of operating a MEMS tunable capacitor comprising: disposing a sprung cantilever over a substrate such as by suspension, the sprung cantilever comprising: a primary movable actuator electrode positioned over a primary stationary actuator electrode deposited on the substrate; a secondary movable actuator electrode positioned over secondary stationary actuator electrode deposited on the substrate; a RF signal path that is electrically isolated from the primary movable actuator electrode and the secondary movable actuator electrode; and a movable RF signal capacitor plate in communication with the RF signal path and positioned over a stationary RF signal capacitor plate electrode deposited on the substrate; and moving the sprung cantilever between an OFF state that can be defined by the potential difference between the stationary and moveable actuator electrodes being zero and an ON state that can be defined by a non-zero potential difference between the stationary and moveable actuator electrodes. ### Claim 24 (depends on 23) The method of claim 23, wherein moving the sprung cantilever to the OFF state comprises establishing a potential difference of zero both between the primary stationary actuator electrode and the primary moveable actuator electrode and between the secondary stationary actuator electrode and the secondary moveable actuator electrode. ### Claim 25 (depends on 23) The method of claim 23, wherein moving the sprung cantilever to the ON state comprises establishing a potential difference between the primary stationary actuator electrode and the primary moveable actuator electrode that is substantially the same as the potential difference between the secondary stationary actuator electrode and the secondary moveable actuator electrode. ### Claim 26 (depends on 23) The method of claim 23, wherein moving the sprung cantilever to the ON state comprises establishing a potential difference between the primary stationary actuator electrode and the primary moveable actuator electrode that is different than the potential difference between the secondary stationary actuator electrode and the secondary moveable actuator electrode. ### Claim 27 (depends on 23) The method of claim 23, wherein moving the sprung cantilever to the ON state comprises establishing the potential difference between the primary stationary actuator electrode and the primary moveable actuator electrode before establishing the potential difference between the secondary stationary actuator electrode and the secondary moveable actuator electrode. ### Claim 28 (depends on 23) The method of claim 23, wherein moving the sprung cantilever to the ON state comprises establishing the potential difference between the secondary stationary actuator electrode and the secondary moveable actuator electrode before establishing the potential difference between the primary stationary actuator electrode and the primary moveable actuator electrode. ### Claim 29 (depends on 23) The method of claim 23, wherein moving the sprung cantilever from an ON state to an OFF state comprises simultaneously providing substantially the same voltage to the primary movable actuator electrode, the primary stationary actuator electrode, the secondary movable actuator electrode, and the secondary stationary actuator electrode. ### Claim 30 (depends on 23) The method of claim 23, wherein moving the sprung cantilever from an ON state to an OFF state comprises establishing a potential difference of zero between the primary movable actuator electrode and the primary stationary actuator electrode before establishing a potential difference of zero between the secondary movable actuator electrode and the secondary stationary actuator electrode. ### Claim 31 (depends on 23) The method of claim 23, wherein moving the sprung cantilever from an ON state to an OFF state comprises establishing a potential difference of zero between the secondary movable actuator electrode and the secondary stationary actuator electrode before establishing a potential difference of zero between the primary movable actuator electrode and the primary stationary actuator electrode.