# US 8,570,704 B2 · Substrate holder, substrate holder unit, substrate transport apparatus, and substrate bonding apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,570,704 B2 - Document ID: US8570704B2 - Status: Granted - Kind: B2 - Application number: 12/879,779 - Filed: 2010-09-10 - Published: 2011-01-13 - Granted: 2013-10-29 - Earliest claimed: 2008-03-13 - Assignees: Nikon Corporation - Applicants: Hidehiro Maeda; Masahiro Yoshihashi - Inventors: Hidehiro Maeda; Masahiro Yoshihashi - Web page: https://patentgrep.com/patent/US8570704B2 ## CPC - H10P 72/72: using electrostatic chucks - H10P 72/3302: {Mechanical parts of transfer devices} - H10P 72/3402: {Mechanical parts of transfer devices} - H10P 72/7621: {characterised by supporting two or more semiconductor substrates} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A substrate holder is reliably transported in a state of holding a substrate. There is provided a substrate holder for holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate holder is to be transported in a state of holding the substrate. The substrate holder includes a holder body that is to have the substrate placed thereon, and a connector terminal that is externally exposed through the holder body, where the connector terminal is attachable to and detachable from an external power supply terminal. There is also provided a substrate transport apparatus for transporting a substrate holder holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate transport apparatus includes a placement section that has a placement surface on which the substrate holder is placed, where the placement section holds the substrate holder, and a power supply terminal that supplies power to the substrate holder placed on the placement surface. ## Claims ### Claim 1 A substrate holder for holding a substrate by means of electrostatic force generated by power supplied from an external source, the substrate holder to be transported in a state of holding the substrate, the substrate holder comprising: a holder body that is to have the substrate placed thereon; and a connector terminal that is externally exposed to outside the holder body through a first surface of the holder body and a second surface of the holder body, the connector terminal operable to receive power supplied from an external power supply terminal via the first surface and operable to receive power supplied from an external power supply terminal via the second surface. ### Claim 2 A substrate holder for holding a substrate by means of electrostatic force generated by power supplied from an external source, the substrate holder to be transported in a state of holding the substrate, the substrate holder comprising: a holder body that is to have the substrate placed thereon; and a connector terminal that is externally exposed, the connector terminal being attachable to and detachable from an external power supply terminal, wherein the substrate holder is transported in a state of being stacked on a different substrate holder that has a different connector terminal attachable to and detachable from an external power supply terminal, and the substrate holder further comprises an exposing section that, while the substrate holder is in the state of being stacked on the different substrate holder, externally exposes the connector terminal of the different substrate holder. ### Claim 3 (depends on 2) The substrate holder as set forth in claim 2, wherein the exposing section externally exposes the connector terminal of the different substrate holder towards a surface toward which the connector terminal of the substrate holder is externally exposed. ### Claim 4 (depends on 2) The substrate holder as set forth in claim 2, wherein the exposing section is a cutout or hole. ### Claim 5 A substrate holder unit to be transported in a state of holding a plurality of substrates therein, the substrate holder unit comprising: a first substrate holder that holds one of the plurality of substrates by means of electrostatic force generated by power supplied from an external source; and a second substrate holder that holds the other of the plurality of substrates by means of electrostatic force generated by power supplied from an external source, wherein the first and second substrate holders each include: a holder body that is to have the substrate placed thereon; a connector terminal that is externally exposed to outside the holder body through a first surface of the holder body and a second surface of the holder body, the connector terminal operable to receive power supplied from an external power supply terminal via the first surface and operable to receive power supplied from an external power supply terminal via the second surface. ### Claim 6 (depends on 5) The substrate holder unit as set forth in claim 5, wherein one of the first and second substrate holders further includes an exposing section that, while the first and second substrate holders are in a state of being stacked on each other, externally exposes the connector terminal of the other of the first and second substrate holders. ### Claim 7 (depends on 6) The substrate holder unit as set forth in claim 6, wherein while the first and second substrate holders are in the state of being stacked on each other, the connector terminals of the first and second substrate holders are exposed toward a same surface. ### Claim 8 (depends on 6) The substrate holder unit as set forth in claim 6, wherein the exposing section is a cutout or hole. ### Claim 9 (depends on 5) The substrate holder unit as set forth in claim 5, wherein when a surface of the first substrate holder on which the substrate is to be placed faces a same direction as a surface of the second substrate holder on which the substrate is to be placed, the connector terminal of the first substrate holder is positioned at a same position as the connector terminal of the second substrate holder when seen from above. ### Claim 10 (depends on 9) The substrate holder unit as set forth in claim 9, wherein when the first and second substrate holders are stacked on each other with the surfaces on which the substrates are to be placed facing each other, the connector terminal of the first substrate holder is positioned at a different position than the connector terminal of the second substrate holder when seen from above. ### Claim 11 (depends on 5) The substrate holder unit as set forth in claim 5, wherein the first and second substrate holders each have a penetrating section that penetrates through the substrate holder from a surface on which the substrate is to be placed to an opposite surface, when a surface of the first substrate holder on which the substrate is to be placed faces a same direction as a surface of the second substrate holder on which the substrate is to be placed, the connector terminal of the first substrate holder is positioned at a same position as the connector terminal of the second substrate holder, and the penetrating section of the first substrate holder is positioned at a same position as the penetrating section of the second substrate holder, and when the first and second substrate holders are stacked on each other with the surfaces on which the substrates are to be placed facing each other, the penetrating section of one of the first and second substrate holders is positioned so as to overlap the connector terminal of the other of the first and second substrate holders. ### Claim 12 (depends on 1) A substrate transport apparatus for transporting a substrate holder, the substrate transport apparatus comprising: the substrate holder as set forth in claim 1; a placement section that has a placement surface on which the substrate holder is placed, the placement section holding the substrate holder; and a power supply terminal that supplies power to the substrate holder placed on the placement surface. ### Claim 13 (depends on 12) The substrate transport apparatus as set forth in claim 12, wherein the power supply terminal includes one or more lower power supply terminals and one or more upper power supply terminals, and when two substrate holders are stacked on each other, the lower power supply terminals are electrically connected to a connector terminal of one of the two substrate holders that is positioned lower, and the upper power supply terminals are electrically connected to a connector terminal of the other of the two substrate holders that is positioned higher. ### Claim 14 (depends on 13) The substrate transport apparatus as set forth in claim 13, wherein the lower and upper power supply terminals are arranged on the placement surface. ### Claim 15 (depends on 13) The substrate transport apparatus as set forth in claim 13, wherein the lower power supply terminals have a height smaller than a thickness of the substrate holder that is positioned lower, and the upper power supply terminals have a height larger than the thickness of the substrate holder that is positioned lower. ### Claim 16 (depends on 13) The substrate transport apparatus as set forth in claim 13, further comprising a rotation section that rotates the placement section between a normal orientation in which the placement surface is positioned under the substrate holder and a reversed orientation in which the placement surface is positioned above the substrate holder, wherein the lower power supply terminals are symmetrically positioned with respect to a rotation axis of the placement section, and the upper power supply terminals are asymmetrically positioned with respect to the rotation axis of the placement section. ### Claim 17 (depends on 16) The substrate transport apparatus as set forth in claim 16, further comprising an anti-disengagement section that moves back and forth between (i) an anti-disengagement position in which the anti-disengagement section covers in a non-contact manner at least a portion of one of surfaces of the substrate and a portion of one of surfaces of the substrate holder and (ii) a retreat position in which the anti-disengagement section allows the substrate and the substrate holder to move along a vertical direction of the placement section, wherein the anti-disengagement section moves back and forth parallel to the one of the surfaces of the substrate holder. ### Claim 18 (depends on 17) The substrate transport apparatus as set forth in claim 17, wherein the anti-disengagement section has a flat-plate section that is parallel to the substrate and covers the one of the surfaces of the substrate and the one of the surfaces of the substrate holder, and the flat-plate section has a plurality of flat-plate protrusions that are arranged outside the substrate and the substrate holder and protrude downward during the normal orientation of the placement section. ### Claim 19 (depends on 18) The substrate transport apparatus as set forth in claim 18, wherein the plurality of flat-plate protrusions have such a dimension that the plurality of flat-plat protrusions do not contact the substrate and the substrate holder when the anti-disengagement section moves back and forth. ### Claim 20 (depends on 18) The substrate transport apparatus as set forth in claim 18, wherein a surface of the flat-plate section that opposes the substrate has a recessed portion that is sized in accordance with the substrate. ### Claim 21 (depends on 18) The substrate transport apparatus as set forth in claim 18, wherein an edge of the flat-plate section that is positioned outside the substrate and the substrate holder has a folded section that extends from the edge towards the placement surface, and the folded section extends beyond the one of the surfaces of the substrate holder. ### Claim 22 (depends on 16) The substrate transport apparatus as set forth in claim 16, wherein the placement section has a plurality of placement protrusions that are arranged outside the substrate and the substrate holder and protrude upward during the normal orientation of the placement section. ### Claim 23 (depends on 22) The substrate transport apparatus as set forth in claim 22, wherein the plurality of placement protrusions have such a dimension that the plurality of placement protrusions do not contact the anti-disengagement section when the anti-disengagement section moves back and forth. ### Claim 24 (depends on 17) The substrate transport apparatus as set forth in claim 17, wherein the placement section has an adsorbing section that adsorbs the substrate holder by means of vacuum. ### Claim 25 (depends on 12) A substrate bonding apparatus comprising: the substrate transport apparatus as set forth in claim 12; and a bonding section that bonds together a plurality of substrates that are transported by the substrate transport apparatus. ### Claim 26 A substrate holder to be transported in a state of holding a substrate, the substrate holder comprising: a holder body that is to have the substrate placed thereon; an electrode that is provided on the holder body, the electrode using power supplied from outside the holder body to generate an adsorbing force to adsorb the substrate; a first terminal that is electrically connected to the electrode and is externally exposed to outside the holder body through a first surface of the holder body, the first terminal operable to receive power supplied from outside the holder body via the first surface; and a second terminal that is electrically connected to the electrode and the first terminal and is externally exposed to outside the holder body through a second surface of the holder body, the second terminal operable to receive power supplied from outside the holder body via the second surface. ### Claim 27 A substrate holder to be transported in a state of holding a substrate, the substrate holder comprising: a holder body that is to have the substrate placed thereon; an electrode that is provided on the holder body, the electrode using power supplied from outside the holder body to generate an adsorbing force to adsorb the substrate; a first terminal that is electrically connected to the electrode, the first terminal operable to receive power supplied from outside the holder body via a first surface of the holder body; and a second terminal that is electrically connected to the electrode and the first terminal, the second terminal operable to receive power supplied from outside via a second surface of the holder body, wherein the substrate holder is transported in a state of being stacked on a different substrate holder that has a connector terminal attachable to and detachable from an external power supply terminal, and the substrate holder further comprises an exposing section that, while the substrate holder is in the state of being stacked on the different substrate holder, externally exposes the connector terminal of the different substrate holder. ### Claim 28 (depends on 1) The substrate holder as set forth in claim 1, wherein the connector terminal is disposed within the holder body and recessed with respect to the first and second surfaces of the holder body. ### Claim 29 (depends on 5) The substrate holder unit as set forth in claim 5, wherein in each of the first and second substrate holders, at least one of the first terminal and the second terminal is disposed within the holder body and recessed with respect to the first and second surfaces of the holder body. ### Claim 30 (depends on 1) The substrate holder as set forth in claim 1, wherein the connector terminal is connectable to different external power supply terminals via the first surface and the second surface. ### Claim 31 (depends on 1) The substrate holder as set forth in claim 1, wherein the first surface and the second surface respectively face different directions from each other. ### Claim 32 (depends on 27) The substrate holder as set forth in claim 27, wherein the first terminal is externally exposed on a placement surface of the holder body on which the substrate is to be placed, the second terminal is externally exposed on a back surface of the holder body that is opposite to the placement surface, and the exposing section externally exposes the connector terminal of the different substrate holder towards the back surface. ### Claim 33 (depends on 27) The substrate holder as set forth in claim 27, wherein the exposing section is a cutout or hole. ### Claim 34 (depends on 5) The substrate holder unit as set forth in claim 5, wherein the connector terminal is capable of abutting against different external power supply terminals via the first surface and the second surface. ### Claim 35 (depends on 5) The substrate holder unit as set forth in claim 5, wherein the first surface and the second surface respectively face different directions from each other. ### Claim 36 (depends on 5) The substrate holder unit as set forth in claim 5, wherein while the first substrate holder and the second substrate holder are in a state of being stacked on each other, the connector terminal of the first substrate holder and the connector terminal of the second substrate holder are externally exposed toward the same surface. ### Claim 37 (depends on 5) The substrate holder unit as set forth in claim 5, wherein the connector terminal of the first substrate holder is positioned at the same position as the connector terminal of the second substrate holder when a surface of the first substrate holder on which the substrate is to be placed faces the same direction as a surface of the second substrate holder on which the substrate is to be placed. ### Claim 38 (depends on 5) The substrate holder unit as set forth in claim 5, wherein when the first substrate holder and the second substrate holder are stacked on each other in such a manner that a surface of the first substrate holder on which the substrate is to be placed faces a surface of the second substrate holder on which the substrate is to be placed, the connector terminal of the first substrate holder and the connector terminal of the second substrate holder are positioned at different positions on the surfaces. ### Claim 39 (depends on 5) The substrate holder unit as set forth in claim 5, wherein at least one of the first substrate holder and the second substrate holder has a penetrating section that penetrates through the substrate holder from a placement surface on which the substrate is to be placed to an opposite back surface, when the placement surface of the first substrate holder faces the same direction as the placement surface of the second substrate holder, the connector terminal of the first substrate holder is positioned at the same position as the connector terminal of the second substrate holder, and when the first substrate holder and the second substrate holder are stacked on each other in such a manner that the placement surfaces face each other, the penetrating section is positioned so as to overlap the connector terminal of one of the first substrate holder and the second substrate holder. ### Claim 40 (depends on 39) The substrate holder unit as set forth in claim 39, wherein each of the first substrate holder and the second substrate holder has the penetrating section, and when the placement surface of the first substrate holder faces the same direction as the placement surface of the second substrate holder, the penetrating section of the first substrate holder is positioned at the same position as the penetrating section of the second substrate holder. ### Claim 41 (depends on 39) The substrate holder unit as set forth in claim 39, wherein the penetrating section is a cutout or hole. ### Claim 42 (depends on 1) A substrate bonding apparatus, comprising: the substrate holder as set forth in claim 1; and a substrate transport apparatus for transporting the substrate holder, the substrate transport apparatus including: a placement section that has a placement surface on which the substrate holder is placed, the placement section holding the substrate holder; and a power supply terminal that supplies power to the substrate holder placed on the placement surface. ### Claim 43 (depends on 42) The substrate bonding apparatus as set forth in claim 42, wherein the power supply terminal includes one or more lower power supply terminals and one or more upper power supply terminals, and when two substrate holders are stacked on each other, the lower power supply terminals are electrically connected to a connector terminal of one of the two substrate holders that is positioned lower, and the upper power supply terminals are electrically connected to a connector terminal of the other of the two substrate holders that is positioned higher. ### Claim 44 (depends on 43) The substrate bonding apparatus as set forth in claim 43, wherein the lower and upper power supply terminals are arranged on the placement surface. ### Claim 45 (depends on 43) The substrate bonding apparatus as set forth in claim 43, wherein the lower power supply terminals have a height smaller than a thickness of the substrate holder that is positioned lower, and the upper power supply terminals have a height larger than the thickness of the substrate holder that is positioned lower. ### Claim 46 (depends on 43) The substrate bonding apparatus as set forth in claim 43, wherein the substrate transport apparatus further includes a rotation section that rotates the placement section between a normal orientation in which the placement surface is positioned under the substrate holder and a reversed orientation in which the placement surface is positioned above the substrate holder, the lower power supply terminals are symmetrically positioned with respect to a rotation axis of the placement section, and the upper power supply terminals are asymmetrically positioned with respect to the rotation axis of the placement section. ### Claim 47 (depends on 46) The substrate bonding apparatus as set forth in claim 46, wherein the substrate transport apparatus further includes an anti-disengagement section that moves back and forth between (i) an anti-disengagement position in which the anti-disengagement section covers in a non-contact manner at least a portion of one of surfaces of the substrate and a portion of one of surfaces of the substrate holder and (ii) a retreat position in which the anti-disengagement section allows the substrate and the substrate holder to move along a vertical direction of the placement section, and the anti-disengagement section moves back and forth parallel to the one of the surfaces of the substrate holder. ### Claim 48 (depends on 47) The substrate bonding apparatus as set forth in claim 47, wherein the anti-disengagement section has a flat-plate section that is parallel to the substrate and covers the one of the surfaces of the substrate and the one of the surfaces of the substrate holder, and the flat-plate section has a plurality of flat-plate protrusions that are arranged outside the substrate and the substrate holder and protrude downward during the normal orientation of the placement section. ### Claim 49 (depends on 48) The substrate bonding apparatus as set forth in claim 48, wherein the plurality of flat-plate protrusions have such a dimension that the plurality of flat-plat protrusions do not contact the substrate and the substrate holder when the anti-disengagement section moves back and forth. ### Claim 50 (depends on 48) The substrate bonding apparatus as set forth in claim 48, wherein a surface of the flat-plate section that opposes the substrate has a recessed portion that is sized in accordance with the substrate. ### Claim 51 (depends on 48) The substrate bonding apparatus as set forth in claim 48, wherein an edge of the flat-plate section that is positioned outside the substrate and the substrate holder has a folded section that extends from the edge towards the placement surface, and the folded section extends beyond the one of the surfaces of the substrate holder. ### Claim 52 (depends on 46) The substrate bonding apparatus as set forth in claim 46, wherein the placement section has a plurality of placement protrusions that are arranged outside the substrate and the substrate holder and protrude upward during the normal orientation of the placement section. ### Claim 53 (depends on 52) The substrate bonding apparatus as set forth in claim 52, wherein the plurality of placement protrusions have such a dimension that the plurality of placement protrusions do not contact the anti-disengagement section when the anti-disengagement section moves back and forth. ### Claim 54 (depends on 47) The substrate bonding apparatus as set forth in claim 47, wherein the placement section has an adsorbing section that adsorbs the substrate holder by means of vacuum. ### Claim 55 (depends on 42) The substrate bonding apparatus as set forth in claim 42, further comprising a bonding section that bonds together a plurality of substrates that are transported by the substrate transport apparatus. ### Claim 56 A substrate holder for holding a substrate by means of electrostatic force generated by power supplied from an external source, the substrate holder to be transported in a state of holding the substrate, the substrate holder comprising: a holder body that is to have the substrate placed thereon; and a connector terminal that is externally exposed, the connector terminal being attachable to and detachable from an external power supply terminal, wherein the substrate holder is transported in a state of being stacked on a different substrate holder that has a connector terminal attachable to and detachable from an external power supply terminal, and the substrate holder further comprises a power access section that, while the substrate holder is in the state of being stacked on the different substrate holder, allows the connector terminal of the different substrate holder to access a power supply. ### Claim 57 (depends on 56) The substrate holder as set forth in claim 56, wherein the power access section externally exposes the connector terminal of the different substrate holder towards a surface toward which the connector terminal of the substrate holder is externally exposed. ### Claim 58 (depends on 56) The substrate holder as set forth in claim 56, wherein the power access section is a cutout or hole. ### Claim 59 (depends on 5) The substrate holder unit as set forth in claim 5, wherein one of the first and second substrate holders further includes a power access section that, while the first and second substrate holders are in a state of being stacked on each other, allows the connector terminal of the other of the first and second substrate holders to access a power supply. ### Claim 60 (depends on 59) The substrate holder unit as set forth in claim 59, wherein while the first and second substrate holders are in the state of being stacked on each other, the connector terminals of the first and second substrate holders are exposed toward a same surface. ### Claim 61 (depends on 59) The substrate holder unit as set forth in claim 59, wherein the power access section is a cutout or hole. ### Claim 62 A substrate holder to be transported in a state of holding a substrate, the substrate holder comprising: a holder body that is to have the substrate placed thereon; an electrode that is provided on the holder body, the electrode using power supplied from outside the holder body to generate an adsorbing force to adsorb the substrate; a first terminal that is electrically connected to the electrode, the first terminal operable to receive power supplied from outside the holder body via a first surface of the holder body; and a second terminal that is electrically connected to the electrode and the first terminal, the second terminal operable to receive power supplied from outside via a second surface of the holder body, wherein the substrate holder is transported in a state of being stacked on a different substrate holder that has a connector terminal attachable to and detachable from an external power supply terminal, and the substrate holder further comprises a power access section that, while the substrate holder is in the state of being stacked on the different substrate holder, allows the connector terminal of the different substrate holder to access a power supply. ### Claim 63 (depends on 62) The substrate holder as set forth in claim 62, wherein the first terminal is externally exposed on a placement surface of the holder body on which the substrate is to be placed, the second terminal is externally exposed on a back surface of the holder body that is opposite to the placement surface, and the power access section externally exposes the connector terminal of the different substrate holder towards the back surface. ### Claim 64 (depends on 62) The substrate holder as set forth in claim 62, wherein the power access section is a cutout or hole.