# US 8,570,685 B1 · Wafer for magnetic head and method for manufacturing the same

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 8,570,685 B1
- Document ID: US8570685B1
- Status: Granted
- Kind: B1
- Application number: 13/448,782
- Filed: 2012-04-17
- Published: 2013-10-17
- Granted: 2013-10-29
- Earliest claimed: 2012-04-17
- Assignees: TDK Corporation
- Applicants: Katsuya Kanakubo; Kenji Senga
- Inventors: Katsuya Kanakubo; Kenji Senga
- Web page: https://patentgrep.com/patent/US8570685B1

## CPC

- G11B 5/3173: {Batch fabrication, i.e. producing a plurality of head structures in one batch}
- G11B 5/1278: {specially adapted for magnetisations perpendicular to the surface of the record carrier}
- G11B 5/3116: {Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks (G11B5/3113, G11B5/245 take precedence)}
- Y10T 29/49032: Fabricating head structure or component thereof
- G11B: INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER (recording measured values in a way that does not require playback through a transducer G01D9/00; recording or playback apparatus using mechanically marked tape, e.g. punched paper tape, or using unit records, e.g. punched or magnetically marked cards G06K; transferring data from one type of record carrier to another G06K1/18; circuits for coupling output of reproducer to radio receiver H04B1/20; gramophone pick-ups or like acoustic electromechanical transducers or circuits therefor H04R)
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A wafer for a magnetic head includes a magnetic pole which has a design capable of avoiding pole missing due to processing with an improved resistance to the processing during a magnetic pole forming process. Each magnetic head element provided in the wafer has a recording magnetic pole film. The magnetic pole film has a large width part, a small width part and a support part. The small width part projects continuously from the large width part and extends with a constant width W1, while the support part is continuous with an end of the small width part and has a width W2. The width W1 and the width W2 satisfy the relationship of 1<W2/W1<2.

## Claims

### Claim 1

A wafer for a magnetic head comprising a plurality of magnetic head elements, each magnetic head element having a recording magnetic pole film, the magnetic pole film having a large width part, a small width part and a support part, the small width part projecting from the large width part and extending with a constant width W1, the support part being continuous with an end of the small width part and having a width W2 which is larger than the width W1 of the small width part, the width W1 of the small width part and the width W2 of the end satisfying the relationship of 1<W2/W1<2.

### Claim 2 (depends on 1)

The wafer for a magnetic head as claimed in claim 1, wherein the support part has a width changing part, the width changing part being continuous with the end of the small width part and having its opposite sides in a width direction inclined in such a direction as to increase its width so that as measured at its end, the width satisfies the width W2.

### Claim 3 (depends on 1)

The wafer for a magnetic head as claimed in claim 1, wherein the support part has a width changing part and a constant width part, the width changing part being continuous with the end of the small width part and having its opposite sides in a width direction inclined in such a direction as to increase its width so that as measured at its end, the width satisfies the width W2, the constant width part extending continuously from the end of the width changing part while maintaining the width W2 of the end.

### Claim 4 (depends on 1)

The wafer for a magnetic head as claimed in claim 1, wherein the support part has a first support part and a second support part, the first support part having a first width changing part and a first constant width part, the first width changing part being continuous with the end of the small width part and having its opposite sides in a width direction inclined in such a direction as to increase its width so that as measured at its end, the width satisfies the width W2, the first constant width part extending continuously from the end of the first width changing part while maintaining the width W2 of the end, the second support part having a second width changing part and a second constant width part, the second width changing part being continuous with an end of the first constant width part and having its opposite sides in the width direction inclined in such a direction as to increase its width, the second constant width part extending continuously from an end of the second width changing part while maintaining a width W3 of the end.

### Claim 5 (depends on 1)

The wafer for a magnetic head as claimed in claim 1, wherein the width W1 is equal to or less than 0.1 μm.

### Claim 6 (depends on 1)

The wafer for a magnetic head as claimed in claim 1, wherein the width W2 is in the range of 0.08 to 0.12 μm.

### Claim 7 (depends on 1)

The wafer for a magnetic head as claimed in claim 1, wherein the recording magnetic pole film is for perpendicular magnetic recording.

### Claim 8 (depends on 1)

The wafer for a magnetic head as claimed in claim 1, wherein each magnetic head element has a plasmon generating element, an optical waveguide and a reproducing element beneath the recording magnetic pole film.

### Claim 9

A method for manufacturing a wafer for a magnetic head having a plurality of magnetic head elements, comprising the step of forming a recording magnetic pole film having a large width part, a small width part and a support part, the small width part projecting continuously from the large width part and extending with a constant width W1, the support part being continuous with an end of the small width part and having a width W2 which is larger than the width W1 of the small width part, the width W1 of the small width part and the width W2 of the end satisfying the relationship of 1<W2/W1<2.

### Claim 10 (depends on 9)

The method as claimed in claim 9, wherein the support part has a width changing part, the width changing part being continuous with the end of the small width part and having its opposite sides in a width direction inclined in such a direction as to increase its width so that as measured at its end, the width satisfies the width W2.

### Claim 11 (depends on 9)

The method as claimed in claim 9, wherein the support part has a width changing part and a constant width part, the width changing part being continuous with the end of the small width part and having its opposite sides in a width direction inclined in such a direction as to increase its width so that as measured at its end, the width satisfies the width W2, the constant width part extending continuously from the end of the width changing part while maintaining the width W2 of the end.

### Claim 12 (depends on 9)

The method as claimed in claim 9, wherein the support part has a first support part and a second support part, the first support part having a first width changing part and a first constant width part, the first width changing part being continuous with the end of the small width part and having its opposite sides in a width direction inclined in such a direction as to increase its width so that as measured at its end, the width satisfies the width W2, the first constant width part extending continuously from the end of the first width changing part while maintaining the width W2 of the end, the second support part having a second width changing part and a second constant width part, the second width changing part being continuous with an end of the first constant width part and having its opposite sides in the width direction inclined in such a direction as to increase its width, the second constant width part extending continuously from an end of the second width changing part while maintaining a width W3 of the end.

### Claim 13 (depends on 9)

The method as claimed in claim 9, wherein the width W1 is equal to or less than 0.1 μm.

### Claim 14 (depends on 9)

The method as claimed in claim 9, wherein the width W2 is in the range of 0.08 to 0.12 μm.

### Claim 15 (depends on 9)

The method as claimed in claim 9, wherein the recording magnetic pole film is for perpendicular magnetic recording.

### Claim 16 (depends on 9)

The method as claimed in claim 9, wherein each magnetic head element has a plasmon generating element, an optical waveguide and a reproducing element beneath the recording magnetic pole film.