# US 8,570,676 B2 · Optical assembly > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,570,676 B2 - Document ID: US8570676B2 - Status: Granted - Kind: B2 - Application number: 13/046,170 - Filed: 2011-03-11 - Published: 2011-07-28 - Granted: 2013-10-29 - Earliest claimed: 2005-01-26 - Assignees: Carl Zeiss SMT GmbH - Applicants: Hermann Bieg; Karl-Eugen Aubele; Yim-Bun Patrick Kwan; Stefan Xalter; Martin Schmidt; Saverio Sanvido; Uy-Liem Nguyen - Inventors: Hermann Bieg; Karl-Eugen Aubele; Yim-Bun Patrick Kwan; Stefan Xalter; Martin Schmidt; Saverio Sanvido; Uy-Liem Nguyen - Web page: https://patentgrep.com/patent/US8570676B2 ## CPC - G02B 7/02: for lenses {(supports for magnifying lenses G02B25/002)} - G02B 7/005: {Motorised alignment} - G02B 7/008: {with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation} - G02B 7/021: {for more than one lens} - G02B 7/023: {permitting adjustment} - G02B 7/026: {using retaining rings or springs (G02B7/027 takes precedence)} - G02B 7/028: {with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation} - G02B 7/1827: {Motorised alignment} - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS ## Abstract An optical assembly supported in an arrangement, especially in an objective or in an illuminating or exposure system, in the interior of a housing comprising at least one optical element, especially a lens, a mirror, or an aperture, wherein the at least one element is influenceable by at least one manipulator is characterized in that the at least one manipulator is arranged either outside of the housing or in a holding means that is separated entirely or to a large extent by the help of a decoupling means, and that there is provided an effective coupling between the manipulator and the element to be influenced by the manipulator in the interior of the arrangement. ## Claims ### Claim 1 A system, comprising: an optical element; a manipulator comprising a step motor comprising a shaft; and a lever rod coupled to the shaft so that, when the shaft rotates, the lever rod rotates about a rotation axis, wherein the optical system is configured to be used in a microlithography objective. ### Claim 2 (depends on 1) The system of claim 1, wherein the optical element comprises an element selected from the group consisting of a lens, a mirror and an aperture. ### Claim 3 (depends on 1) The system of claim 1, wherein the system comprises a housing, and the manipulator is inside the housing. ### Claim 4 (depends on 1) The system of claim 1, wherein the system comprises a housing, and the step motor is inside the housing. ### Claim 5 (depends on 1) The system of claim 1, further comprising a reduction gear configured to rotate the shaft. ### Claim 6 (depends on 5) The system of claim 5, wherein the shaft is an eccentric shaft. ### Claim 7 (depends on 5) The system of claim 5, wherein the shaft is an eccentric shaft having an eccentricity between 0.2 and 2 mm. ### Claim 8 (depends on 5) The system of claim 5, wherein the reduction gear comprises a micro-harmonic reduction drive gear. ### Claim 9 (depends on 8) The system of claim 8, wherein the micro-harmonic reduction drive gear provides for a reduction ratio of 1 to 1,000. ### Claim 10 (depends on 5) The system of claim 5, comprising flexible structures. ### Claim 11 (depends on 10) The system of claim 10, wherein the flexible structures are adjacent the step motor. ### Claim 12 (depends on 11) The system of claim 11, wherein the flexible structures are adjacent the reduction gear. ### Claim 13 (depends on 10) The system of claim 10, wherein the flexible structures are adjacent the reduction gear. ### Claim 14 (depends on 10) The system of claim 10, wherein the flexible structures comprise solid body hinges, monolithic elements and/or bearings. ### Claim 15 (depends on 5) The system of claim 5, further comprising a sensor configured to measure movement of the shaft and/or of the reduction gear. ### Claim 16 (depends on 5) The system of claim 5, wherein the reduction gear provides for a reduction ratio of 1 to 1,000. ### Claim 17 (depends on 1) The system of claim 1, wherein the shaft is an eccentric shaft having an eccentricity between 0.2 and 2 mm. ### Claim 18 (depends on 1) The system of claim 1, comprising a plurality of levers that are interconnected by solid body hinges. ### Claim 19 (depends on 1) The system of claim 1, comprising flexible structures. ### Claim 20 (depends on 19) The system of claim 19, wherein the flexible structures are adjacent the step motor. ### Claim 21 (depends on 19) The system of claim 19, wherein the flexible structures comprise solid body hinges, monolithic elements and/or bearings. ### Claim 22 (depends on 1) The system of claim 1, wherein the lever comprises first and second lever arms. ### Claim 23 (depends on 22) The system of claim 22, wherein the first lever arm is longer than the second lever arm. ### Claim 24 (depends on 23) The system of claim 23, wherein a reduction ratio between the first and the second lever arms is 1:50. ### Claim 25 (depends on 23) The system of claim 23, wherein, when the lever rod rotates about the rotation axis, the second lever arm is lifted. ### Claim 26 (depends on 1) The system of claim 1, further comprising a connecting element which connects the shaft and the lever rod, wherein the connecting element is a rod or piston. ### Claim 27 (depends on 26) The system of claim 26, wherein rotation of the shaft about the rotation axis causes the connecting element to move, and movement of the connecting element causes the lever rod to move. ### Claim 28 An objective, comprising: a system, comprising: an optical element; a manipulator comprising a step motor comprising a shaft; and a lever rod coupled to the shaft so that, when the shaft rotates, the lever rod rotates about a rotation axis, wherein the objective is a microlithography objective. ### Claim 29 An apparatus, comprising: an objective, comprising: a system, comprising: an optical element; a manipulator comprising a step motor comprising a shaft; and a lever rod coupled to the shaft so that, when the shaft rotates, the lever rod rotates about a rotation axis, wherein the system is a microlithography exposure projection apparatus.