# US 8,570,630 B2 · Piezoelectric mirror device, optical equipment incorporating the same, and piezoelectric mirror device fabrication process

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- Number: US 8,570,630 B2
- Document ID: US8570630B2
- Status: Granted
- Kind: B2
- Application number: 13/445,690
- Filed: 2012-04-12
- Published: 2012-08-09
- Granted: 2013-10-29
- Earliest claimed: 2007-06-08
- Assignees: Dai Nippon Printing Co., Ltd.
- Applicants: Shinji Maekawa
- Inventors: Shinji Maekawa
- Web page: https://patentgrep.com/patent/US8570630B2

## CPC

- G02B 26/0858: {the reflecting means being moved or deformed by piezoelectric means}
- H04N 1/113: using oscillating or rotating mirrors
- Y10T 29/42: Piezoelectric device making
- Y10T 29/49005: Acoustic transducer
- Y10T 29/49128: Assembling formed circuit to base
- Y10T 29/49155: Manufacturing circuit on or in base
- Y10T 29/49798: Dividing sequentially from leading end, e.g., by cutting or breaking
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A piezoelectric mirror device (11) comprises a frame portion (12) having a centrally located opening (13), a mirror portion (14) positioned at the opening (13), a pair of mirror support portions (15) adapted to support the mirror portion (14) rotatably relative the frame portion (12) and a pair of drive portions (16) that is a multilayer structure of lower electrodes (17), piezoelectric element (18) and an upper electrode (19). The mirror support portions (15) are formed of a material having a Young's modulus of up to 160 GPa, and the frame portion (12) includes a cutout (13a) at a part of a site wherein there are the drive portions (16) positioned. The cutout (13a) is in contact with the opening (13).

## Claims

### Claim 1

A piezoelectric mirror device, comprising: a frame portion having a centrally located opening; a pair of drive portions that each have a multilayer structure of a lower electrode, a piezoelectric element and an upper electrode and are located at said frame portion;
a mirror portion positioned at said opening; and a pair of mirror support portions adapted to support said mirror portion rotatably relative to said frame portion depending on operation of said drive portions, said drive portions being configured to rotate the mirror portion via the mirror support portions, and a center axis of the mirror support portions coincides with a location of the drive portions,
wherein said mirror portion, said mirror support portions, and said upper electrode are formed integrally such that they are formed continuously of an electrically conductive material having a Young's modulus of up to 160 GPa, and said frame portion includes a cutout or thinner portion at a part of a site where there are said drive portions positioned, wherein said cutout or thinner portion is in contact with said opening.

### Claim 2 (depends on 1)

The piezoelectric mirror device according to claim 1, wherein said mirror support portions are not formed integrally with the lower electrode constituting a part of said drive portions.