# US 8,570,506 B2 ยท System for inspecting defects of panel device > Agents: this data is available as JSON from the patentgrep API and MCP server โ€” see https://patentgrep.com/llms.txt - Number: US 8,570,506 B2 - Document ID: US8570506B2 - Status: Granted - Kind: B2 - Application number: 12/144,648 - Filed: 2008-06-24 - Published: 2009-10-01 - Granted: 2013-10-29 - Earliest claimed: 2008-03-28 - Assignees: Industrial Technology Research Institute - Applicants: Jung-Yu Li; Shih-Pu Chen; Yi-Ping Lin; Lian-Yi Cho - Inventors: Jung-Yu Li; Shih-Pu Chen; Yi-Ping Lin; Lian-Yi Cho - Web page: https://patentgrep.com/patent/US8570506B2 ## CPC - G01N 21/8803: {Visual inspection (measuring projectors G01B9/08)} - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) ## Abstract System for inspecting defects of panel device includes a to-be-inspected device, a platform for holding the to-be-inspected device, a power unit, and a light source apparatus. The light source apparatus is controlled by the power unit to provide an inspection light to the to-be-inspected device for inspecting whether or not having defects. The light source apparatus includes a cathode structure, an anode structure, a fluorescent layer, and a low-pressure gas layer. The fluorescent layer is located between the cathode structure and the anode structure. The low-pressure gas layer is filled between the cathode structure and the anode structure, for inducing the cathode to emit electrons uniformly. The low-pressure gas layer has an electron mean free path, allowing at least enough electrons to directly hit the fluorescent layer under an operating voltage. ## Claims ### Claim 1 A system for inspecting defects of a panel device, comprising: a to-be-inspected device; a power unit; and a light source apparatus, holding the to-be-inspected device, wherein a light emitting flat plane of the light source apparatus is directly contacting with the to-be-inspected device, wherein the to-be-inspected device, the power unit, and the light source apparatus are formed as an integrated module, wherein the light source apparatus is controlled by the power unit to provide an inspection light to the to-be-inspected device for inspecting whether or not having defects, wherein the light source apparatus comprises: a cathode structure; an anode structure; a fluorescent layer, located between the cathode structure and the anode structure; and a low-pressure gas layer, filled between the cathode structure and the anode structure, for inducing a cathode to emit electrons uniformly, wherein the low-pressure gas layer comprises an electron mean free path, allowing electrons to directly hit the fluorescent layer under an operating voltage. ### Claim 2 (depends on 1) The system for inspecting defects of a panel device according to claim 1, wherein the cathode structure and the anode structure are respectively surface structures in parallel with each other, for providing a surface inspection light. ### Claim 3 (depends on 1) The system for inspecting defects of a panel device according to claim 1, wherein a pressure of the low-pressure gas layer is in a range of 10-10โˆ’3 torrs. ### Claim 4 A system for inspecting defects of a panel device, comprising: a to-be-inspected device; a platform, holding the to-be-inspected device; a power unit; and a light source apparatus, controlled by the power unit to provide an inspection light to the to-be-inspected device for inspecting whether or not having defects, wherein a light emitting flat plane of the light source apparatus is directly contacting with the to-be-inspected device, wherein the to-be-inspected device, the power unit, and the light source apparatus are formed as an integrated module, wherein the light source apparatus comprises: a cathode structure; an anode structure; a fluorescent layer, located between the cathode structure and the anode structure; and a low-pressure gas layer, filled between the cathode structure and the anode structure, for inducing a cathode to emit electrons uniformly, wherein the low-pressure gas layer comprises an electron mean free path, allowing electrons to directly hit the fluorescent layer under an operating voltage. ### Claim 5 (depends on 4) The system for inspecting defects of a panel device according to claim 4, wherein the cathode structure and the anode structure are respectively surface structures in parallel with each other, for providing a surface inspection light. ### Claim 6 (depends on 4) The system for inspecting defects of a panel device according to claim 4, wherein a pressure of the low-pressure gas layer is in a range of 10-10โˆ’3 torrs. ### Claim 7 (depends on 4) The system for inspecting defects of a panel device according to claim 4, further comprising a sidewall structure, for separating the cathode structure and the anode structure to form a closed space for the low-pressure gas layer. ### Claim 8 (depends on 4) The system for inspecting defects of a panel device according to claim 4, wherein the fluorescent layer is located on a surface of the anode structure. ### Claim 9 (depends on 4) The system for inspecting defects of a panel device according to claim 4, wherein the to-be-inspected device is a display panel. ### Claim 10 (depends on 4) The system for inspecting defects of a panel device according to claim 4, wherein the platform moves the to-be-inspected device. ### Claim 11 (depends on 4) The system for inspecting defects of a panel device according to claim 4, further comprising a photographing device for taking photographs of the to-be-inspected device. ### Claim 12 (depends on 4) The system for inspecting defects of a panel device according to claim 4, wherein a surface of the cathode structure and/or the anode structure of the light source apparatus further comprises a discharge material layer. ### Claim 13 (depends on 4) The system for inspecting defects of a panel device according to claim 4, wherein a surface of the cathode structure of the light source apparatus further comprises a secondary electron source material. ### Claim 14 (depends on 4) The system for inspecting defects of a panel device according to claim 4, wherein a gas of the low-pressure gas layer comprises inert gas or atmospheric air. ### Claim 15 (depends on 4) The system for inspecting defects of a panel device according to claim 4, wherein a gas of the low-pressure gas layer comprises O2, H2, or CO2. ### Claim 16 (depends on 4) The system for inspecting defects of a panel device according to claim 4, wherein the fluorescent layer on the anode structure of the light source apparatus emits a visible light according to a selected material. ### Claim 17 (depends on 4) The system for inspecting defects of a panel device according to claim 4, wherein the anode structure of the light source apparatus is a surface structure. ### Claim 18 (depends on 4) The system for inspecting defects of a panel device according to claim 4, wherein the cathode structure of the light source apparatus is a surface structure, and the fluorescent layer is located on a surface of the anode structure facing the cathode structure. ### Claim 19 (depends on 4) The system for inspecting defects of a panel device according to claim 4, wherein the cathode structure of the light source apparatus comprises at least one linear cathode. ### Claim 20 (depends on 4) The system for inspecting defects of a panel device according to claim 4, wherein the light source apparatus further comprises a substrate structure, comprising at least one curved groove, wherein the cathode structure is at least one linear cathode extending above the curved groove, and the anode structure is located on a concave surface of the curved groove. ### Claim 21 (depends on 4) The system for inspecting defects of a panel device according to claim 4, wherein the light source apparatus further comprises: a first substrate; and a second substrate, forming a closed space with the first substrate, wherein the anode structure and the cathode structure are placed on the first substrate in the closed space, the fluorescent layer is composed of a plurality of monomers, located between the cathode structure and the anode structure on the first substrate, for forming at least one light-emitting region, the low-pressure layer is filled in the closed space, for inducing the cathode to emit electrons uniformly. ### Claim 22 (depends on 4) The system for inspecting defects of a panel device according to claim 4, wherein the to-be-inspected device comprises an image display panel.