# US 8,570,502 B2 · Scanning mirror device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,570,502 B2 - Document ID: US8570502B2 - Status: Granted - Kind: B2 - Application number: 13/400,504 - Filed: 2012-02-20 - Published: 2012-11-29 - Granted: 2013-10-29 - Earliest claimed: 2011-02-21 - Assignees: Carl Zeiss AG - Applicants: Stefan Richter; Veljko Milanovic; Günter Rudolph; Michel Stutz; Gerhard Krampert - Inventors: Stefan Richter; Veljko Milanovic; Günter Rudolph; Michel Stutz; Gerhard Krampert - Web page: https://patentgrep.com/patent/US8570502B2 ## CPC - G01B 11/26: for measuring angles or tapers; for testing the alignment of axes - G02B 26/105: {with one or more pivoting mirrors or galvano-mirrors (G02B26/101 takes precedence)} - G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS ## Abstract There is provided a scanning mirror device with a microsystem scanning mirror which is mounted rotatably about at least one axis, and a detection module which has a light source which emits a light beam, and a position detector, wherein the detection module directs the light beam onto the scanning mirror from behind, with the result that the light beam is reflected, at the back of the scanning mirror, to the position detector which measures the position of the reflected light beam, from which the rotation angle of the scanning mirror about the at least one axis can be deduced. ## Claims ### Claim 1 A scanning mirror device, comprising: a MEMS microsystem scanning mirror rotatably mounted about at least one axis to the scanning mirror device; and a detection module, including a light source which emits a light beam, a position detector, imaging optics configured to focus the light beam onto the back of the scanning mirror, and projection optics configured to image the light beam reflected by the back of the scanning mirror as a collimated light beam onto the position detector, wherein the detection module directs the light beam onto the scanning mirror from behind, with the result that the light beam is reflected, at the back of the scanning mirror, to the position detector which measures the position of the reflected light beam, from which the rotation angle of the scanning mirror about the at least one axis can be deduced. ### Claim 2 (depends on 1) The scanning mirror device according to claim 1, wherein the imaging optics are formed as 1:1 imaging optics. ### Claim 3 (depends on 1) The scanning mirror device according to claim 1, wherein the imaging optics includes a beam splitter configured to separate the light beam from the light source and the light beam reflected by the back of the scanning mirror. ### Claim 4 (depends on 3) The scanning mirror device according to claim 3, wherein the imaging optics further includes at least two partial lens systems and the beam splitter is arranged between the two partial lens systems. ### Claim 5 (depends on 1) The scanning mirror device according to claim 1, wherein the detection module is configured to emit, using the measured position of the reflected light beam, an angle signal representing the rotation angle of the scanning minor about the at least one axis. ### Claim 6 (depends on 1) The scanning mirror device according to claim 1, wherein the position detector is formed as a quadrant detector. ### Claim 7 (depends on 1) The scanning mirror device according to claim 1, wherein the light beam of the light source passes through the position detector and strikes the back of the scanning mirror. ### Claim 8 (depends on 1) The scanning mirror device according to claim 1, wherein the microsystem scanning mirror is incorporated in a housing, wherein the bottom of the housing includes a passage through which the light beam of the light source can be directed onto the back of the scanning mirror. ### Claim 9 (depends on 8) The scanning mirror device according to claim 8, wherein the detection module is configured to emit, using the measured position of the reflected light beam, an angle signal representing the rotation angle of the scanning mirror about the at least one axis. ### Claim 10 (depends on 1) The scanning mirror device according to claim 1, wherein the detection module is configured to emit, using the measured position of the reflected light beam, an angle signal representing the rotation angle of the scanning mirror about the at least one axis. ### Claim 11 (depends on 1) The scanning mirror device according to claim 1, wherein the microsystem scanning mirror is formed monolithically. ### Claim 12 (depends on 1) The scanning mirror device according to claim 1, wherein the microsystem scanning mirror comprises a deflection mirror and a tilting mechanism, wherein a carrier is provided and the tilting mechanism is formed on the carrier and connected with the deflection mirror in order to rotate the microsystem scanning mirror about the at least one axis. ### Claim 13 (depends on 12) The scanning mirror device according to claim 12, wherein the carrier includes a passage through which the light beam of the light source can be directed onto the back of the microsystem scanning mirror. ### Claim 14 (depends on 12) The scanning mirror device according to claim 12, wherein the microsystem scanning mirror and the carrier are formed monolithically. ### Claim 15 (depends on 14) The scanning mirror device according to claim 14, wherein the carrier includes a passage through which the light beam of the light source can be directed onto the back of the microsystem scanning mirror. ### Claim 16 (depends on 1) The scanning mirror device according to claim 1, wherein the carrier includes a passage through which the light beam of the light source can be directed onto the back of the micro system scanning minor.