# US 8,570,491 B2 · System for patterning flexible foils > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,570,491 B2 - Document ID: US8570491B2 - Status: Granted - Kind: B2 - Application number: 12/919,966 - Filed: 2009-02-27 - Published: 2011-10-27 - Granted: 2013-10-29 - Earliest claimed: 2008-02-27 - Assignees: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO - Applicants: Erwin Rinaldo Meinders; Maria Peter; Peter Theodorus Maria Giesen; Wilhelmus Johannes Maria de Laat - Inventors: Erwin Rinaldo Meinders; Maria Peter; Peter Theodorus Maria Giesen; Wilhelmus Johannes Maria de Laat - Web page: https://patentgrep.com/patent/US8570491B2 ## CPC - G03F 7/707: {Chucks, e.g. chucking or un-chucking operations or structural details} - B23Q 3/1546: {using permanent magnets} - B32B 38/1825: {characterised by the control or constructional features of devices for tensioning, stretching or registration} - G03F 7/70758: {Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving} - G03F 7/70783: {Handling stress or warp of chucks, masks or workpieces, e.g. to compensate for imaging errors or considerations related to warpage of masks or workpieces due to their own weight} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - B23Q: DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING (tools of the kind used in lathes or boring machines B23B27/00); MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT - B32B: LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM ## Abstract According to one aspect, the invention provides a table for compensating deformation in flexible foils (1) The table comprises a supportive base (2) and a deformation compensation system (3). This system comprises a plurality of movable elements (4), supported by the base (2), wherein the movable elements form a surface for supporting the flexible foil. The movable elements comprise clamps (6) for clamping the foil (5). The movable elements (4) are individually movable parallel to the surface for supporting the foil, so as to stretch the clamped foil into a predefined shape. The table for compensating deformation in flexible foils may be used in a manufacturing process of flexible functional foils to compensate deformation of the foils during sequential patterning. ## Claims ### Claim 1 A table for compensating deformation in flexible foils, comprising a supportive base; and a deformation compensation system, said deformation compensation system comprising a plurality of movable elements supported by the base, wherein said movable elements form a surface for supporting the flexible foil, said movable elements further comprising magnetic clamps for clamping the foil, wherein said movable elements are individually movable parallel to the surface for supporting the foil, so as to stretch the clamped foil into a predefined shape. ### Claim 2 (depends on 1) The table of claim 1, wherein the movable elements are regularly distributed over substantially the whole surface of the table, so as to form a grid of movable elements. ### Claim 3 (depends on 1) The table of claim 1, wherein the movable elements are spaced apart by gaps with a minimum distance in a range between 2 and 20 micrometers and a maximum distance in a range between 50 micrometers and 500 micrometers. ### Claim 4 (depends on 3) The table of claim 3, wherein the movable elements have staggered edges, to prevent the gaps from extending in-line along a multitude of elements and to minimize sagging of the foil. ### Claim 5 (depends on 1) The table of claim 1, wherein the movable elements further comprise actuators for moving the movable elements. ### Claim 6 (depends on 1) The table of claim 1, wherein the movable elements further comprise adhesion enhancing layers for improving the grip of the clamps on the foil. ### Claim 7 (depends on 6) The table of claim 6, wherein the adhesion enhancing layers are friction enhancing layers. ### Claim 8 (depends on 6) The table of claim 6, wherein a thickness of the individual adhesion enhancing layers compensates for differing heights of the movable elements, so as to planarize the foil supporting surface. ### Claim 9 (depends on 1) A system for patterning flexible foils, comprising a foil feed, for providing the foils; the table according to claim 1; transporting means for moving the foil at least partly over the table; a patterning unit arranged for patterning the section of the foil above the table; and an alignment system, communicatively coupled to the deformation compensation system, provided in the table. ### Claim 10 (depends on 9) The system of claim 9, wherein the alignment system is arranged to detect a marker pattern provided on the foil. ### Claim 11 (depends on 10) The system of claim 10, wherein the patterning unit comprises irradiating means. ### Claim 12 (depends on 9) The system of claim 9, wherein the transporting means comprise at least two reels, so as to be used in a reel-to-reel manufacturing process. ### Claim 13 (depends on 12) The system of claim 12, wherein at least one of said reels comprises a plurality of movable elements formed as magnetic elements, wherein each magnetic element is individually addressable for controlling the transport of the foil. ### Claim 14 (depends on 13) The system according to claim 13, wherein the patterning unit comprises irradiating means. ### Claim 15 (depends on 12) The system of claim 12, wherein the patterning unit comprises irradiating means. ### Claim 16 (depends on 9) The system of claim 9 wherein the patterning unit comprises irradiating means. ### Claim 17 A method of patterning a flexible foil, using a system for patterning flexible foils, said system for patterning flexible foils comprising a table for compensating deformation in said foil, said table comprising a supportive base and a deformation compensation system, said deformation compensation system comprising a plurality of movable elements supported by the base, wherein said movable elements form a surface for supporting the flexible foils, said movable elements further comprising magnetic clamps for clamping the foil, the method comprising the steps of: providing a system for patterning flexible foils; providing a foil comprising a magnetic portion for clamping the foil magnetically; clamping the foil to the movable elements by said magnetic clamps; individually moving the movable elements parallel to the foil, so as to stretch the foil into a predefined shape; and patterning the foil above the table. ### Claim 18 (depends on 17) The method of claim 17, further comprising the step of individually moving the movable elements perpendicular to the foil to stretch the foil into the predefined shape. ### Claim 19 (depends on 17) The method of claim 17, wherein the magnetic portion comprises magnetic particles, to locally adjust the clamping force.