# US 8,570,452 B2 · Electro-optical device having a holding capacitor comprising a first electrode, a second electrode, and a third electrode with a first capacitor insulation film and a second capacitor insulation film each being formed of first and second capacitor insulation layers

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- Number: US 8,570,452 B2
- Document ID: US8570452B2
- Status: Granted
- Kind: B2
- Application number: 13/079,203
- Filed: 2011-04-04
- Published: 2011-10-06
- Granted: 2013-10-29
- Earliest claimed: 2010-04-05
- Assignees: Seiko Epson Corporation
- Applicants: Minoru Moriwaki
- Inventors: Minoru Moriwaki
- Web page: https://patentgrep.com/patent/US8570452B2

## CPC

- G02F 1/136213: {Storage capacitors associated with the pixel electrode}
- H10D 86/481: {integrated with passive devices, e.g. auxiliary capacitors}
- H10D 86/60: wherein the TFTs are in active matrices
- G02F 1/13629: {Multilayer wirings}
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES

## Abstract

An electro-optical device includes: a pixel electrode provided on a substrate; a transistor being provided between the substrate and the pixel electrodes; and a holding capacitor, provided between the pixel electrode and the transistor, configured of a first electrode, a second electrode provided opposing the first electrode via a first capacitor insulation film, and a third electrode provided opposing the first electrode via a second capacitor insulation film. Both the first capacitor insulation film and the second capacitor insulation film have multiple layers; the first capacitor insulation film and the second electrode are formed symmetrical to the second capacitor insulation film and the third electrode when viewed from the first electrode.

## Claims

### Claim 1

An electro-optical device comprising:
a pixel electrode provided on a substrate;
a transistor provided corresponding to the pixel electrode, the transistor being provided between the substrate and the pixel electrode; and
a holding capacitor provided between the pixel electrode and the transistor, the holding capacitor including:
a first electrode;
a second electrode provided opposing the first electrode via a first capacitor insulation film, the first capacitor insulation film having:
a first capacitor insulation layer provided between the first electrode and the second electrode; and
a second capacitor insulation layer provided between the first capacitor insulation layer and the second electrode, the second capacitor insulation layer being made from a material different from a material of the first capacitor insulation layer; and
a third electrode provided opposing the first electrode via a second capacitor insulation film, the second capacitor insulation film having:
a third capacitor insulation layer provided between the first electrode and the third electrode, the third capacitor insulation layer being made from a same material as a material of the first capacitor insulation layer; and
a fourth capacitor insulation layer provided between the third capacitor insulation layer and the third electrode, the fourth capacitor insulation layer being made from a same material as a material of the second capacitor insulation layer.

### Claim 2 (depends on 1)

The electro-optical device according to claim 1,
wherein the second electrode and the third electrode are electrically connected to a relay layer provided between the pixel electrode and the holding capacitor via different contact holes.

### Claim 3 (depends on 1)

The electro-optical device according to claim 1,
wherein the first electrode is electrically connected to a capacitor line; and
the second electrode and the third electrode are electrically connected to the pixel electrode and the transistor.

### Claim 4 (depends on 3)

The electro-optical device according to claim 3,
wherein a predetermined constant potential is supplied to the first electrode via the capacitor line.

### Claim 5 (depends on 1)

The electro-optical device according to claim 1,
wherein the first electrode is electrically connected to the pixel electrode and the transistor; and
the second electrode and the third electrode are electrically connected to the capacitor line.

### Claim 6 (depends on 5)

The electro-optical device according to claim 5,
wherein a predetermined constant potential is supplied to the second electrode and the third electrode via the capacitor line.

### Claim 7 (depends on 1)

An electronic apparatus comprising the electro-optical device according to claim 1.