# US 8,570,223 B2 · Reconfigurable antenna > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,570,223 B2 - Document ID: US8570223B2 - Status: Granted - Kind: B2 - Application number: 12/663,803 - Filed: 2008-06-13 - Published: 2010-11-18 - Granted: 2013-10-29 - Earliest claimed: 2007-06-13 - Assignees: The University Court of the University of Edinburgh - Applicants: Tughrul Arslan; Anthony John Walton; Nakul R. Haridas; Ahmed Osman El-Rayis - Inventors: Tughrul Arslan; Anthony John Walton; Nakul R. Haridas; Ahmed Osman El-Rayis - Web page: https://patentgrep.com/patent/US8570223B2 ## CPC - H01Q 1/38: formed by a conductive layer on an insulating support {(patch antennas H01Q9/0407; microstrip dipole antennas H01Q9/065; microstrip slot antennas H01Q13/106; transmission line microstrip antennas H01Q13/206; manufacturing reflecting surfaces using insulating material for supporting the reflecting surface H01Q15/142)} - H01Q 3/30: varying the {relative} phase {between the radiating elements of an array (H01Q3/2605, H01Q3/2658, H01Q3/2682, H01Q3/44 take precedence)} - H01Q 9/0407: {Substantially flat resonant element parallel to ground plane, e.g. patch antenna (dipole H01Q9/285; monopole H01Q9/40)} - H01Q 21/065: {Patch antenna array} - H01Q 23/00: Antennas with active circuits or circuit elements integrated within them or attached to them - H01P 1/127: {Strip line switches} - H01Q: ANTENNAS, i.e. RADIO AERIALS (radiators or antennas for microwave heating H05B6/72) - H01P: WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE (operating at optical frequencies G02B) ## Abstract A micro electromechanical (MEMS) antenna (36) is positioned on one side of a substrate and is connected to a MEMS switch comprising a capacitor bridge (46) and to a transmission line (42) by means of a thru hole or via (48) which forms an electrically conducting path through the substrate. This arrangement provides a common ground plane for the antenna and switch and shields the switch from the electromagnetic radiation received or transmitted from the antenna. The switch may comprise a topmost metal layer which extends across a bridge structure formed by a polymer layer (19). The polymer layer comprises poly-monochloro-para-xylene (parylene-C). Homogeneous or heterogeneous antenna array structures are implemented. The antenna arrays may include one or more different type of antennas with for example different shapes, rotations and reflections. ## Claims ### Claim 1 An apparatus for transmitting and/or receiving electromagnetic waves, the apparatus comprising: a substrate comprising a conductive semiconductor substrate; an antenna fabricated on a first side of the substrate, wherein the antenna comprises a plurality of antenna elements; a plurality of microelectromechanical (MEMS) switches fabricated on a reverse side of the substrate; and a plurality of connectors extending through the substrate to operatively connect the MEMS switches to the antenna, wherein the antenna and the plurality of microelectromechanical (MEMS) switches have a common ground, the common ground being the conductive semiconductor substrate that shields the MEMS switches from electromagnetic radiation received or transmitted from the antenna. ### Claim 2 (depends on 1) The apparatus of claim 1, wherein the substrate comprises a semiconductor layer and at least one insulating layer. ### Claim 3 (depends on 2) The apparatus of claim 2, wherein the at least one insulating layer forms a substrate for the antenna. ### Claim 4 (depends on 1) The apparatus of claim 1, wherein the antenna comprises a patterned metal surface. ### Claim 5 (depends on 4) The apparatus of claim 4, wherein the patterned metal surface comprises a spiral. ### Claim 6 (depends on 5) The apparatus of claim 5, wherein the spiral is curved. ### Claim 7 (depends on 1) The apparatus of claim 1, wherein the antenna elements are connected. ### Claim 8 (depends on 1) The apparatus of claim 1, wherein one or more of the antenna elements can be switched on or off. ### Claim 9 (depends on 1) The apparatus of claim 1, wherein one or more of the antenna elements can be switched on or off to control the operating frequency of the apparatus. ### Claim 10 (depends on 1) The apparatus of claim 1, wherein each MEMS switch is a capacitive switch. ### Claim 11 (depends on 1) The apparatus of claim 1, wherein each MEMS switch operates to change the phase of the input to or output from the antenna. ### Claim 12 (depends on 1) The apparatus of claim 1, wherein each MEMS switch comprises: a substrate; a first conducting layer; a material attached to the substrate wherein, the material acts as a mechanical support to the second conducting layer and as a dielectric. ### Claim 13 (depends on 12) The apparatus of claim 12, wherein the material is adapted to bend in response to the application of a force thereby changing the capacitance of the MEMS switch. ### Claim 14 (depends on 12) The apparatus of claim 12, wherein the material is adapted to bend in response to the application of a voltage across the first and second conducting layers thereby changing the capacitance of the MEMS switch. ### Claim 15 (depends on 14) The apparatus of claim 14, wherein the bridge structure comprises a beam shaped to alter the mechanical properties of the bridge and the way in which it moves in response to the applied voltage. ### Claim 16 (depends on 15) The apparatus of claim 15, wherein the beam is symmetrical. ### Claim 17 (depends on 15) The apparatus of claim 15, wherein the beam is asymmetrical. ### Claim 18 (depends on 15) The apparatus of claim 15, wherein the beam comprises a serpentine flexure. ### Claim 19 (depends on 15) The apparatus of claim 15, wherein the shape of the beam is configured such that it twists or bends in a predetermined manner upon the application of the voltage. ### Claim 20 (depends on 15) The apparatus of claim 15, wherein the MEMS switch is configured to connect and disconnect an electromagnetic device to a feed line or signal path. ### Claim 21 (depends on 20) The apparatus of claim 20, wherein the MEMS switch is used to alter the phase of the signal on the feed line. ### Claim 22 (depends on 21) The apparatus of claim 21, wherein the change in the phase with the applied voltage is substantially linear over a predetermined voltage range. ### Claim 23 (depends on 21) The apparatus of claim 21, wherein a plurality of the MEMS switches are combined to provide a controllable phase shift from 0 to 360° upon application of the applied voltage. ### Claim 24 (depends on 12) The apparatus of claim 12, wherein the material has a Young's Modulus of elasticity of less than 4.5 GPa. ### Claim 25 (depends on 12) The apparatus of claim 12, wherein the material has a dielectric constant at 1 MHz of more than 2. ### Claim 26 (depends on 12) The apparatus of claim 12, wherein the material is selected from the group consisting of a polymer, derived for para-xylylene, poly-monochoro-para-xylylene, and poly-para-xylylene. ### Claim 27 (depends on 12) The apparatus of claim 12, wherein the second conducting layer is a metal. ### Claim 28 (depends on 12) The apparatus of claim 12, wherein the second conducting layer comprises Aluminum. ### Claim 29 (depends on 12) The apparatus of claim 12, wherein the MEMS switch further comprises a co-planar waveguide mounted on the substrate. ### Claim 30 (depends on 12) The apparatus of claim 12, wherein the MEMS switch is integrated in a microstrip topology. ### Claim 31 (depends on 1) The apparatus of claim 1, wherein the connector is a through hole or via. ### Claim 32 (depends on 1) The apparatus of claim 1, wherein the apparatus further comprises an integrated circuit attached to the apparatus at or near the MEMS switch. ### Claim 33 (depends on 32) The apparatus of claim 32, wherein the integrated circuit comprises a CMOS circuit. ### Claim 34 (depends on 33) The apparatus of claim 33, wherein the CMOS circuit comprises a CMOS radio. ### Claim 35 (depends on 1) The apparatus of claim 1, wherein the plurality of antenna elements comprises an antenna array comprising a plurality of first antenna elements each having a first antenna configuration and further comprising a plurality of second antenna elements each having a second antenna configuration wherein first antenna configuration and second antenna configuration are different. ### Claim 36 (depends on 35) The apparatus of claim 35, wherein the second antenna configuration comprises a transformation of the first antenna configuration. ### Claim 37 (depends on 36) The apparatus of claim 36, wherein the transformation comprises at least one of rotation, reflection, scaling and distortion. ### Claim 38 (depends on 35) The apparatus of claim 35, wherein the plurality of first antenna elements is interleaved with the plurality of second antenna elements. ### Claim 39 (depends on 35) The apparatus of claim 35, wherein the antenna array comprises a first element group comprising the first and second antenna elements and a second element group comprising a transformation of the first element group. ### Claim 40 (depends on 36) The apparatus of claim 36, wherein the transformation comprises reflection. ### Claim 41 (depends on 1) The apparatus of claim 1, wherein the connector comprises conducting material attached thereto. ### Claim 42 An apparatus for transmitting and/or receiving electromagnetic waves, the apparatus comprising: a substrate; an antenna fabricated on a first side of the substrate, wherein the antenna comprises a plurality of antenna elements; a plurality of microelectromechanical (MEMS) switches fabricated on a reverse side of the substrate; and a plurality of connectors extending through the substrate to operatively connect the MEMS switches to the antenna, wherein the substrate comprises a conductive semiconductor substrate to shield the MEMS switches from electromagnetic radiation received or transmitted from the antenna and wherein the antenna and plurality of microelectromechanical (MEMS) switches are monolithically fabricated on the conductive semiconductor substrate. ### Claim 43 (depends on 42) The apparatus of claim 42, wherein the MEMS switches and the antenna have a common ground. ### Claim 44 (depends on 43) The apparatus of claim 43, wherein the common ground comprises the conductive semiconductor substrate. ### Claim 45 (depends on 42) The apparatus of claim 42, wherein each MEMS switch comprises: a substrate; a first conducting layer; a material attached to the substrate wherein, the material acts as a mechanical support to the second conducting layer and as a dielectric, and wherein the MEMS switch is operable to alter the phase of a signal on a feed line or signal path. ### Claim 46 (depends on 42) The apparatus of claim 42, wherein the plurality of antenna elements comprises an antenna array comprising a plurality of first antenna elements each having a first antenna configuration and further comprising a plurality of second antenna elements each having a second antenna configuration wherein first antenna configuration and second antenna configuration are different.