Oscillator with MEMS resonator

A MEMS oscillator comprising:

• a feedback-type oscillation circuit including a MEMS resonator and an amplifier;
• a voltage control unit operable to control a bias voltage applied to an oscillating member of the MEMS resonator;
• and
• an auto gain control unit operable to receive an output from the amplifier and to output, to the amplifier, based on a level of the output from the amplifier, an amplitude control signal for increasing or decreasing a gain of the amplifier such that the level of the output from the amplifier comes to be a predetermined level, for controlling the gain of the amplifier;
• wherein the voltage control unit controls the bias voltage applied to the oscillating member of the MEMS resonator based on an operating temperature of the MEMS resonator such that a peak gain of the MEMS resonator comes to have a predetermined value regardless of a level of the operating temperature, and
• the MEMS oscillator further includes a temperature sensor operable to measure the operating temperature of the MEMS resonator and to output a result of the measurement,
• the result of the measurement of the operating temperature outputted from the temperature sensor is inputted to the voltage control unit, and the voltage control unit uses the result of the measurement as the operating temperature of the MEMS resonator.