Tuning fork quartz crystal resonator including recess on base
AssigneeWafer Mems Co., Ltd.
InventorsChien-Cheng Yang, Win-Yng Wang, Hung-Peng Lee
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Abstract
A tuning fork quartz crystal resonator includes a base, a first resonating arm, and a second resonating arm. The base has a generally planar fifth main surface and a generally planar sixth main surface opposite to each other, and has a fifth side surface and a sixth side surface opposite to each other. The first resonating arm is connecting to one side of the base. The second resonating arm is connecting to the same side of the base. A recess is formed on the fifth main surface, and the recess is sized and configured such that a first width near the first resonating arm and the second resonating arm is greater than a second width away from the first resonating arm and the second resonating arm.
Claims2
A tuning fork quartz crystal resonator, comprising:
- a base having two generally planar main surfaces opposite to each other, and two side surfaces opposite to each other;
- a first resonating arm connecting to one side of the base;
- and
- a second resonating arm connecting to the same side of the base;
- wherein a recess is formed on one of the main surfaces and does not completely pass through the base, the recess keeps a distance from each end and each side surface of the base, the recess is sized and configured such that a first width near the first resonating arm and the second resonating arm is greater than a second width away from the first resonating arm and the second resonating arm.
Dependencies are inferred from the claim text.