Piezoelectric resonator with capacitive sense and/or force rebalance electrodes to control an amplitude of vibration
AssigneeHRL Laboratories, LLC
InventorsRandall L. Kubena, Yook-Kong Yong
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Abstract
In an embodiment, a piezoelectric resonator configured for parametric amplification is disclosed. The piezoelectric resonator may include or comprise a piezoelectric member, and first and second resonator electrodes associated with the piezoelectric member and positioned to enable a first electric field to be generated in a first direction. The piezoelectric resonator may also include or comprise a parametric drive electrode associated with the piezoelectric member and positioned to enable a second electric field to be generated in a second direction.
Claims10
A piezoelectric resonator comprising:
- a piezoelectric member;
- a resonator electrode associated with said piezoelectric member and positioned to enable a first electric field to be generated in a first direction;
- and
- a plurality of capacitive sense and/or force rebalance electrodes associated with said piezoelectric member and positioned to control an amplitude of vibration of said piezoelectric resonator in said first direction.
A piezoelectric resonator comprising:
- a piezoelectric member;
- resonator electrodes disposed on said piezoelectric member and positioned to enable a first electric field to be generated in a first direction in said piezoelectric member;
- and
- a plurality of capacitive sense and/or force rebalance electrodes disposed on said piezoelectric member and positioned to control an amplitude of vibration of said piezoelectric resonator in said first direction, said plurality of capacitive sense and/or force rebalance electrodes being spaced from said resonator electrodes.
Dependencies are inferred from the claim text.