Multi-axis actuating apparatus
AssigneeAcademia Sinica
InventorsEn-Te Hwu, Ing-Shouh Hwang
Life of this patent
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Abstract
A multi-axis actuating apparatus for a nano-positioning apparatus includes a movable element attached to a sample platform, a plurality of driving elements, and a plurality of actuators. The driving elements frictionally engage the movable element and are configured to selectively move the movable element along a first direction. The plurality of actuators move the plurality of driving elements when driving signals are applied to the plurality of actuators. Different driving signals may be applied to the plurality of actuators to cause different movement of the driving elements such that the movable element has different displacements in different directions along the plurality of driving elements. The movable element is titled due to the different displacements.
Claims23
A multi-axis actuating apparatus for a positioning apparatus comprising:
- a movable element having a longitudinal axis;
- a platform attached to a longitudinal end of the movable element;
- a plurality of driving elements frictionally engaging and in contact with an outer peripheral surface of the movable element and selectively moving the movable element along a first direction parallel to the longitudinal axis due to frictional engagement between the driving elements and the outer peripheral surface of the movable element;
- and
- a plurality of actuators that move the plurality of driving elements along the first direction when driving signals are applied to the plurality of actuators,
- wherein different driving signals are applied to the plurality of actuators to cause different movement of the driving elements on the outer peripheral surface of the movable element such that the movable element has different displacements along the plurality of driving elements and is titled due to the different displacement.
A multi-axis actuating apparatus comprising:
- a movable element defining a first guiding groove and a second guiding groove;
- a platform secured to the movable element;
- a first guiding rod frictionally engaging the first guiding groove;
- a second guiding rod frictionally engaging the second guiding groove;
- a first actuator connected to the first guiding rod for moving the first guiding rod when the first actuator is actuated;
- a second actuator connected to the second guiding rod for moving the second guiding rod when the second actuator is actuated;
- and
- a housing that supports the first and second actuators,
- wherein the first and second actuators are actuated differently to cause different displacement of the first and second guiding grooves, such that the movable element is titled.
Dependencies are inferred from the claim text.