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US 8,569,926 B2Granted
Manufacturing method for boundary acoustic wave device and boundary acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorsHajime Kando, Mari Saji
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Abstract
A manufacturing method for a boundary acoustic wave device is capable of certainly providing the boundary acoustic wave device with desired target frequency characteristics. The manufacturing method for the boundary acoustic wave device includes a process for preparing a laminated body that includes a first medium, a second medium laminated on the first medium, and an IDT electrode that is disposed at an interface between the first and second media, and a process for implanting ions from an outer portion of the second medium and adjusting a frequency.
Claims4
A boundary acoustic wave device comprising:
- a first medium made of a piezoelectric body;
- a second medium made of a dielectric laminated on the first medium;
- and
- an IDT electrode disposed at an interface between the first medium and the second medium;
- wherein
- the first medium and/or the second medium includes an ion or atom implantation region.
3 more elements
Dependencies are inferred from the claim text.