# US 8,569,893 B2 · Self-aligned, integrated circuit contact

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 8,569,893 B2
- Document ID: US8569893B2
- Status: Granted
- Kind: B2
- Application number: 13/193,212
- Filed: 2011-07-28
- Published: 2011-11-17
- Granted: 2013-10-29
- Earliest claimed: 2002-08-29
- Assignees: Micron Technology, Inc.
- Applicants: Philip J. Ireland
- Inventors: Philip J. Ireland
- Web page: https://patentgrep.com/patent/US8569893B2

## CPC

- H10W 20/069: {by forming self-aligned vias or self-aligned contact plugs}
- H10B 12/485: {Bit line contacts}
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10B: ELECTRONIC MEMORY DEVICES

## Abstract

This document discusses, among other things, example systems including integrated circuit contacts configured to reduce the likelihood of shorting to unrelated portions of overlying conductive material due to contact misalignment.

## Claims

### Claim 1

An electronic system comprising:
a processor; and
an integrated circuit die coupled to the processor, the integrated circuit die including an interconnect structure, the interconnect structure including:
an insulation material;
a conductive material overlaying the insulation material;
a conductive interconnect disposed in an opening of the insulation material and underlying a portion of the conductive material, the conductive interconnect comprising:
a horizontal top surface connected to the conductive material;
a vertical side surface; and
a notch defined by a non-horizontal and non-vertical surface extending between the top surface and the side surface; and
a dielectric material connected to the non-horizontal and non-vertical surface defining the notch of the conductive interconnect.

### Claim 2 (depends on 1)

The electronic system of claim 1, wherein on a first side of the notch, a horizontal cross-sectional area of the contact is roughly circular, and on a second side of the notch, the horizontal cross-sectional area of the contact includes a roughly circular portion and an edge defined by a line that substantially bisects the horizontal cross-sectional area.

### Claim 3 (depends on 1)

The electronic system of claim 1, wherein the integrated circuit die further comprises:
a node region connected to a bottom surface of the contact opposite the horizontal top surface of the contact.

### Claim 4 (depends on 3)

The electronic system of claim 3, wherein the node region comprises a doped node.

### Claim 5 (depends on 3)

The electronic system of claim 3, wherein the contact is configured to pass a signal to activate a transistor connected to the node region.

### Claim 6 (depends on 1)

The electronic system of claim 1, wherein the contact includes tungsten.

### Claim 7 (depends on 1)

The electronic system of claim 1, wherein the contact includes aluminum.

### Claim 8 (depends on 1)

The electronic system of claim 1, further comprising:
a user interface device coupled to the processor.

### Claim 9 (depends on 8)

The electronic system of claim 8, wherein the user interface device comprises:
a card reader.

### Claim 10 (depends on 8)

The electronic system of claim 8, wherein the user interface device comprises:
at least one of an ignition switch or a gas pedal.

### Claim 11

An integrated electronic system comprising:
a processor; and
a memory circuit having a plurality of leads coupled to the processor, the memory circuit including a memory cell, the memory cell including:
an insulating material forming a surface of the integrated memory cell;
a contact within a contact opening in the insulating material, the contact including:
a horizontal top surface;
a vertical side surface; and
a notch defined by a non-horizontal and non-vertical surface extending between the horizontal top surface and the vertical side surface;
a conductive material overlaying the contact and contacting the horizontal top surface of the contact; and
a dielectric material connected to the non-horizontal and non-vertical surface defining the notch of the contact.

### Claim 12 (depends on 11)

The integrated electronic system of claim 11, wherein the non-horizontal and non-vertical surface is concave between the horizontal top surface and the vertical side surface.

### Claim 13 (depends on 11)

The integrated electronic system of claim 11, wherein the non-horizontal and non-vertical surface is roughly a planar, angled surface between the horizontal top surface and the vertical side surface.

### Claim 14 (depends on 11)

The integrated electronic system of claim 11, wherein proximate to the notch, a horizontal cross-section area of the contact is roughly circular.

### Claim 15 (depends on 11)

The integrated electronic system of claim 11, wherein, proximate to the notch, a horizontal cross-section area of the contact includes a roughly circular portion and one edge defined by a line that bisects the horizontal cross-section.

### Claim 16 (depends on 11)

The integrated electronic system of claim 11, including a node region connected to the contact, wherein the node region is connected at a bottom surface of the contact opposite the substantially horizontal top surface.

### Claim 17 (depends on 16)

The integrated electronic system of claim 16, wherein the node region includes a node of a metal-oxide semiconductor (MOS) device of the memory cell.

### Claim 18 (depends on 11)

The integrated electronic system of claim 11, including an access port coupled to the processor.

### Claim 19 (depends on 18)

The integrated electronic system of claim 18, wherein the access port is configured to couple to at least one of a card reader, a display monitor, a currency dispenser, a keypad, or a speaker.

### Claim 20 (depends on 18)

The integrated electronic system of claim 18, wherein the access port is configured to couple to at least one of an ignition switch or an acceleration pedal.