# US 8,569,838 B2 · Control of local environment for polysilicon conductors in integrated circuits

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- Number: US 8,569,838 B2
- Document ID: US8569838B2
- Status: Granted
- Kind: B2
- Application number: 13/049,862
- Filed: 2011-03-16
- Published: 2012-09-20
- Granted: 2013-10-29
- Earliest claimed: 2011-03-16
- Assignees: Texas Instruments Incorporated
- Applicants: James Walter Blatchford, Jr.; Yong Seok Choi
- Inventors: James Walter Blatchford, Jr.; Yong Seok Choi
- Web page: https://patentgrep.com/patent/US8569838B2

## CPC

- H10D 30/023: {having multiple independently-addressable gate electrodes influencing the same channel (manufacture or treatment of dual gate TFTs H10D30/031)}
- H10D 64/01326: {Aspects related to lithography, isolation or planarisation of the conductor}
- H10D 84/0172: {Manufacturing their gate conductors}
- H10D 84/038: {using silicon technology, e.g. SiGe}
- H10D 89/10: Integrated device layouts
- H10D 30/60: Insulated-gate field-effect transistors [IGFET] (H10D30/40 takes precedence)
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES

## Abstract

A method of fabricating gate level electrodes and interconnects in an integrated circuit, and an integrated circuit so fabricated, with improved process margin for the gate level interconnects of a width near the critical dimension. Off-axis illumination, as used in the photolithography of deep sub-micron critical dimension, is facilitated by the patterned features having a preferred orientation in a common direction, with a pitch constrained to within a relatively narrow range. Interconnects in that same gate level, for example “field poly” interconnects, that run parallel to an array of gate elements are placed within a specified distance range from the ends of the gate elements, or at a distance sufficient to allow sub-resolution assist features.

## Claims

### Claim 1

An integrated circuit formed at a semiconducting surface of a body, comprising:
at least one active area at the semiconducting surface;
a plurality of electrodes formed at a gate level in the integrated circuit, each electrode extending for a length in a common direction with others of the plurality of electrodes, each electrode having a width at about a critical dimension for the integrated circuit, the critical dimension corresponding to a minimum photolithographically patterned feature size for the integrated circuit, the plurality of electrodes disposed relative to one another at a substantially constant pitch within a preselected range;
an isolation dielectric structure disposed at the surface, and defining the boundary of the at least one active area; and
the at least one interconnect, formed at the gate level in the integrated circuit, and disposed over the isolation dielectric structure, the at least one interconnect having a width at about the critical dimension for the integrated circuit, the at least one interconnect having a portion disposed at a location overlying the isolation dielectric structure that has a length extending in a direction substantially perpendicular to the common direction of the plurality of electrodes;
wherein the plurality of electrodes and the the at least one interconnect are formed by a process comprising the steps of:
depositing a conductor layer over the at least one active area and isolation dielectric structure;
photolithographically patterning and etching the conductor layer using a photomask defining features in the conductor layer in which, for each of the plurality of electrodes that has a portion disposed over the isolation dielectric structure having an end located closest to the at least one interconnect, that end is disposed at a distance from the at least one interconnect between about 1.00 and about 1.20 times the nominal spacing of photomask features defining the electrodes, or greater than about 1.80 times the pitch.

### Claim 2 (depends on 1)

The integrated circuit of claim 1, wherein the plurality of electrodes, the at least one interconnect, and the plurality of electrodes comprise polycrystalline silicon.

### Claim 3 (depends on 1)

The integrated circuit of claim 1, wherein the plurality of electrodes comprises:
a plurality of transistor gate electrodes, each having a portion extending in the common direction over the at least one active area;
and further comprising:
transistor source/drain regions, each disposed at the surface of the active area on a side of the portion of a corresponding gate electrode extending in the common direction over that active area.

### Claim 4 (depends on 3)

The integrated circuit of claim 3, wherein the plurality of electrodes further comprises:
at least one dummy electrode formed at the gate level, the dummy electrode having at least a portion of a width at about the critical dimension for the integrated circuit, overlying the isolation dielectric structure, that portion of the dummy electrode extending in the common direction, and disposed relative to a neighboring one of the plurality of transistor gate electrodes by the substantially constant pitch.

### Claim 5 (depends on 1)

The integrated circuit of claim 1, wherein the portion of the one of the plurality of electrodes having an end located closest to the at least one interconnect has a width at about the critical dimension for the integrated circuit.

### Claim 6 (depends on 1)

The integrated circuit of claim 1, wherein the critical dimension is less than about 65 nm.

### Claim 7 (depends on 6)

The integrated circuit of claim 6, wherein the critical dimension is about 42 nm or less.

### Claim 8 (depends on 1)

The integrated circuit of claim 1, wherein the at least one interconnect has a corner portion disposed over the isolation dielectric structure, and disposed at a location that is in the common direction from an end of one of the plurality of electrodes that is within a specified distance from an edge of the active region;
and wherein the distance between the photomask feature defining the corner portion of the at least one interconnect and the photomask feature defining the end of the electrode is greater than about 1.20 times the nominal spacing.

### Claim 9 (depends on 1)

The integrated circuit of claim 1, wherein, for each of the plurality of electrodes that has an end disposed over the isolation dielectric structure within a specified distance from an edge of the active region, the photomask feature defining that end of the electrode is at a distance of at least about 1.05 times the nominal spacing away from the photomask feature defining the at least one interconnect.

### Claim 10 (depends on 1)

The integrated circuit of claim 1, wherein, for each of the plurality of electrodes that has an end disposed over the isolation dielectric structure within a specified distance from an edge of the active region, the photomask feature defining that end of the electrode is at a distance of at least about 1.20 times the nominal spacing away from the photomask feature defining a second interconnect, the second interconnect having a width greater than the critical dimension.