Temperature stabilitized MEMS
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTung-Tsun Chen, Chia-Hua Chu, Chung-Hsien Lin, Jui-Cheng Huang
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Abstract
A semiconductor device with temperature control system. Embodiments of the device may include a MEMS chip including a first heater with a dedicated first temperature control loop and a CMOS chip including a second heater with a dedicated second temperature control loop. Each control loop may have a dedicated temperature sensor for controlling the thermal output of each heater. The first heater and sensor are disposed proximate to a MEMS device in the MEMS chip for direct heating thereof. The temperature of the MEMS chip and CMOS chip are independently controllable of each other via the temperature control loops.
Claims13
A semiconductor package comprising:
- a substrate;
- a MEMS device provided on the substrate, the MEMS device comprising:
- a body;
- a first heating element integrated with the body, and a dedicated first temperature control loop operable to control operation of the first heating element, the first heating element being operable to generate heat when a current flows through the element and transfer the heat directly to the body of the MEMS device;
- and
- a CMOS chip provided on the substrate, the CMOS chip including a second heating element and a dedicated second temperature control loop operable to control operation of the second heating element;
- wherein the temperature of the MEMS device and CMOS chip are independently controllable;
- wherein the first temperature control loop comprises a first power controller comprising circuitry operable to control power supply to the first heating element and a first temperature sensor operable to measure an operating temperature of the MEMS device, operation of the first power controller being controlled at least in part by the first temperature sensor;
- wherein the first temperature sensor and first heating element are physically disposed in the MEMS chip;
- and
- wherein the first power controller is disposed in the CMOS chip.
Dependencies are inferred from the claim text.