# US 8,569,724 B2 · Induction heated buffer gas heat pipe for use in an extreme ultraviolet source

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- Number: US 8,569,724 B2
- Document ID: US8569724B2
- Status: Granted
- Kind: B2
- Application number: 13/326,043
- Filed: 2011-12-14
- Published: 2013-06-20
- Granted: 2013-10-29
- Earliest claimed: 2011-12-14
- Assignees: Plex LLC
- Applicants: Malcolm W. McGeoch
- Inventors: Malcolm W. McGeoch
- Web page: https://patentgrep.com/patent/US8569724B2

## CPC

- H05B 6/36: Coil arrangements
- H05B 6/105: {using a susceptor}
- H05B: ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL

## Abstract

The successful use of lithium vapor in an extreme ultraviolet (EUV) light source depends upon an intense localized heat source at the center of conical structures that evaporate, condense and re-supply liquid lithium. Induction heating of a hollow structure with toroidal topology via an internal helical field coil, can supply intense heat at its innermost radius. The resulting slim radio frequency heated structure has high optical transmission from a central EUV producing plasma to collection mirrors outside of the structure, improving EUV source efficiency and reliability.

## Claims

### Claim 1

A buffer gas heat pipe for the containment of metal vapor comprising a plurality of hollow disc-shaped or conical structures of toroidal topology collectively immersed in a buffer gas, each structure containing an internal helical coil powered by a radio-frequency current to induce a skin effect heating current that flows in loops defined by radial sections of the structure, with the most intense delivery of heat at the least radius of the structure.

### Claim 2 (depends on 1)

A buffer gas heat pipe as in claim 1 in which the buffer gas is helium and the metal is lithium.

### Claim 3 (depends on 1)

A buffer gas heat pipe as in claim 1 in which the skin depth of penetration of the radio-frequency power is less than the wall thickness of the hollow disc-shaped or conical structures.

### Claim 4 (depends on 2)

A buffer gas heat pipe as in claim 2 in which at least part of the wall of each of the hollow structures is composed of a lithium-resistant metal, including but not confined to molybdenum, stainless steel or iron.

### Claim 5 (depends on 1)

A buffer gas heat pipe as in claim 1 in which the external surface of the hollow disc-shaped or conical structures has grooves disposed radially in order to aid the return flow of condensed metal to a hotter, more central location where it re-evaporates.

### Claim 6 (depends on 1)

A buffer gas heat pipe as in claim 1 in which the external surface of the hollow disc-shaped or conical structures has meshes in order to aid the return flow of condensed metal to a hotter, more central location where it re-evaporates.

### Claim 7 (depends on 1)

A buffer gas heat pipe as in claim 1 in which two or more of the disc-shaped or conical structures are connected electrically to the output terminals of a pulsed power supply that drives an electrical discharge in the metal vapor.

### Claim 8 (depends on 7)

A buffer gas heat pipe as in claim 7 in which the electrical discharge in the metal vapor induces a plasma pinch of sufficiently high temperature to radiate extreme ultraviolet or soft X-ray light.

### Claim 9 (depends on 8)

An extreme ultraviolet source system comprising a buffer gas heat pipe discharge as in claim 8 and a reflecting light collector to re-direct extreme ultraviolet light emitted by the discharge to a distant focal point for use in an application.