# US 8,569,721 B2 · Extreme ultra violet light source apparatus

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- Number: US 8,569,721 B2
- Document ID: US8569721B2
- Status: Granted
- Kind: B2
- Application number: 12/372,958
- Filed: 2009-02-18
- Published: 2009-09-03
- Granted: 2013-10-29
- Earliest claimed: 2008-02-28
- Assignees: Gigaphoton Inc.
- Applicants: Masaki Nakano; Akira Endo
- Inventors: Masaki Nakano; Akira Endo
- Web page: https://patentgrep.com/patent/US8569721B2

## CPC

- H05G 2/0023: {Constructional details of the ejection system}
- H05G 2/0088: {for preconditioning the plasma generating material}
- H05G: X-RAY TECHNIQUE (investigating or analysing materials by the use of X-rays G01N23/00; apparatus for X-ray photography G03B42/02; X-ray tubes H01J35/00; TV systems having X-ray input H04N5/321)

## Abstract

In an LPP type EUV light source apparatus, the intensity of radiated EUV light is stabilized by improving the positional stability of droplets. The extreme ultra violet light source apparatus includes: a chamber in which extreme ultra violet light is generated; a target supply division including a target tank for storing a target material therein and an injection nozzle for injecting the target material in a jet form, for supplying the target material into the chamber; a charging electrode applied with a direct-current voltage between the target tank and itself, for charging droplets when the target material in the jet form injected from the injection nozzle is broken up into the droplets; a laser for applying a laser beam to the droplets of the target material to generate plasma; and a collector mirror for collecting extreme ultra violet light radiated from the plasma to output the extreme ultra violet light.

## Claims

### Claim 1

An extreme ultra violet light source apparatus for generating extreme ultra violet light from plasma generated by irradiating a target material supplied to a region with a laser beam introduced from an external unit, said apparatus comprising:
a chamber in which the plasma is generated;
a target supply division for supplying the target material to the region within said chamber, including a nozzle for supplying a stream of the target material into said chamber, at least a part of said nozzle having an electric insulation property, and including a target tank for pressurizing the target material stored therein with a gas to supply the target material to said nozzle, a potential of said target tank being set to a ground potential;
a charging electrode disposed between said nozzle and said region;
a power supply and control unit for applying a voltage between said target tank and said charging electrode;
a collector mirror for collecting extreme ultra violet light from the plasma to output the extreme ultra violet light; and
a target collecting unit for collecting the target material.

### Claim 2 (depends on 1)

The extreme ultra violet light source apparatus according to claim 1, wherein said power supply and control unit applies a direct-current voltage between said target tank and said charging electrode.

### Claim 3 (depends on 2)

The extreme ultra violet light source apparatus according to claim 2, wherein the direct-current voltage is no higher than 1 kV.

### Claim 4 (depends on 1)

The extreme ultra violet light source apparatus according to claim 1, wherein said charging electrode has one of a cylindrical shape, a parallel plate shape, and a ring shape.

### Claim 5 (depends on 4)

The extreme ultra violet light source apparatus according to claim 4, wherein said charging electrode is directly attached to an insulating part of said nozzle.

### Claim 6 (depends on 4)

The extreme ultra violet light source apparatus according to claim 4, wherein said charging electrode is arranged so that a position where the stream of the target material from said nozzle is separated into droplets is located at said charging electrode.

### Claim 7 (depends on 1)

The extreme ultra violet light source apparatus according to claim 1, further comprising a position adjustment mechanism for adjusting the position of said nozzle.

### Claim 8 (depends on 1)

The extreme ultra violet light source apparatus according to claim 1, wherein the stream of the target material becomes droplets to be charged by the charging electrode.

### Claim 9

An extreme ultra violet light source apparatus for generating extreme ultra violet light from plasma generated by irradiating a target material supplied to a region with a laser beam introduced from an external unit, said apparatus comprising:
a chamber in which the plasma is generated;
a target supply division for supplying the target material to the region within said chamber, including (a) a nozzle for supplying the target material into said chamber, (b) a vibrator for applying vibration to said nozzle, and (c) a target tank for pressurizing the target material stored therein with a gas to supply the target material to said nozzle, a potential of said target tank being set to a ground potential;
a charging electrode disposed between said nozzle and said region;
a control unit for maintaining a voltage between said target tank and said charging electrode to a value no higher than 1 kV;
a collector mirror for collecting extreme ultra violet light from the plasma to output the extreme ultra violet light; and
a target collecting unit for collecting the target material.