# US 8,569,707 B2 · Radiation detection apparatus and radiation detection system

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- Number: US 8,569,707 B2
- Document ID: US8569707B2
- Status: Granted
- Kind: B2
- Application number: 13/296,053
- Filed: 2011-11-14
- Published: 2012-05-24
- Granted: 2013-10-29
- Earliest claimed: 2010-11-22
- Assignees: Canon Kabushiki Kaisha
- Applicants: Minoru Watanabe; Chiori Mochizuki; Keigo Yokoyama; Jun Kawanabe; Kentaro Fujiyoshi; Hiroshi Wayama
- Inventors: Minoru Watanabe; Chiori Mochizuki; Keigo Yokoyama; Jun Kawanabe; Kentaro Fujiyoshi; Hiroshi Wayama
- Web page: https://patentgrep.com/patent/US8569707B2

## CPC

- G01T 1/2002: {Optical details, e.g. reflecting or diffusing layers}
- G01T 1/2928: {using solid state detectors}
- H10D 99/00: Subject matter not provided for in other groups of this subclass
- H10F 39/026: {Wafer-level processing}
- H10F 39/1898: {Indirect radiation image sensors, e.g. using luminescent members}
- H10F 39/804: {Containers or encapsulations}
- G01T: MEASUREMENT OF NUCLEAR OR X-RADIATION (radiation analysis of materials, mass spectrometry G01N23/00; tubes for determining the presence, intensity, density or energy of radiation or particles H01J47/00)
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION

## Abstract

A radiation detection apparatus includes a scintillator, a photoelectric conversion unit, and a grid for removing scattered radiation. The photoelectric conversion unit includes a plurality of pixels arranged in a two-dimensional array on a substrate. Each pixel is configured to convert visible light output from the scintillator into an electric signal. The grid, the substrate, the photoelectric conversion unit, and the scintillator are disposed in this order from a radiation-incident side of the radiation detection apparatus to an opposite side thereof. In this radiation detection apparatus in which the scintillator is disposed on the side opposite to the radiation-incident side, scattered radiation is effectively removed.

## Claims

### Claim 1

A radiation detection apparatus comprising:
a scintillator configured to convert incident radiation into visible light;
a photoelectric conversion unit including a plurality of pixels arranged in a two-dimensional array on a substrate, each pixel configured to convert the visible light into an electric signal; and
a grid for removing scattered radiation including radiation-absorptive members and radiation-transmissive members arranged alternately,
wherein the grid, the substrate, the photoelectric conversion unit, and the scintillator are disposed in this order from a radiation-incident side of the radiation detection apparatus to an opposite side thereof, the photoelectric conversion unit is disposed on a surface of the substrate opposite to a surface on which the radiation is incident, and
wherein the grid is disposed such that the grid is at least partially in contact with the radiation-incident surface of the substrate or such that the grid is bonded to the radiation-incident surface of the substrate.

### Claim 2 (depends on 1)

The radiation detection apparatus according to claim 1, wherein, when L denotes the distance between the surface of the grid opposite to a radiation-incident surface thereof and the radiation-incident surface of the scintillator, the distance L satisfies a condition represented by a following mathematical expression: t+TL4×P×h/D where h denotes the thickness of the grid, D denotes the space between each two adjacent radiation-absorptive members in which one of the radiation-transmissive members is disposed, T denotes the thickness of the substrate, t denotes the thickness of the photoelectric conversion unit, and P denotes the pixel pitch of pixels.

### Claim 3 (depends on 2)

The radiation detection apparatus according to claim 2, wherein the substrate has a surface formed by a thinning process applied to a side on which the radiation is incident,
and wherein the thickness T of the substrate is 0.1 to 0.5 mm.

### Claim 4 (depends on 1)

The radiation detection apparatus according to claim 1, further comprising a housing in which the substrate, the photoelectric conversion unit, the scintillator, and the grid are disposed.

### Claim 5 (depends on 4)

The radiation detection apparatus according to claim 4,
wherein the housing includes an enclosure case and a cover, the enclosure case including a support base that supports the scintillator such that a surface opposite to a radiation-incident surface thereof is fixed to the support base, the cover disposed on a radiation-incident side of the enclosure case,
wherein a printed circuit board is connected to an end of the substrate via a flexible wiring board, the printed circuit board including a control circuit disposed thereon to control at least one of a driving circuit for controlling the photoelectric conversion unit and a reading circuit for reading an electric signal from the photoelectric conversion unit, and
wherein the printed circuit board is disposed on a side, opposite to a radiation-incident side, of the support base.

### Claim 6 (depends on 5)

The radiation detection apparatus according to claim 5, wherein
the scintillator includes a fluorescent layer disposed on a radiation-incident side of the scintillator and configured to convert the radiation into the visible light, and a protective element disposed on a side, opposite to the radiation-incident side, of the scintillator and configured to protect the fluorescent layer,
and wherein the surface of the scintillator, on which the protective element is disposed, is fixed to the support base.

### Claim 7 (depends on 1)

A radiation detection system comprising:
the radiation detection apparatus according to claim 1;
a signal processing unit configured to process a signal from the radiation detection apparatus;
a storage unit configured to store a signal supplied from the signal processing unit;
a display unit configured to display the signal supplied from the signal processing unit; and
a transmitting unit configured to transmit the signal supplied from the signal processing unit.
