# US 8,569,698 B2 · Thermal detector, thermal detection device, and electronic instrument > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,569,698 B2 - Document ID: US8569698B2 - Status: Granted - Kind: B2 - Application number: 13/186,775 - Filed: 2011-07-20 - Published: 2012-01-26 - Granted: 2013-10-29 - Earliest claimed: 2010-07-26 - Assignees: Seiko Epson Corporation - Applicants: Jun Takizawa; Takafumi Noda; Taketomi Kamikawa; Mitsuhiro Yamamura - Inventors: Jun Takizawa; Takafumi Noda; Taketomi Kamikawa; Mitsuhiro Yamamura - Web page: https://patentgrep.com/patent/US8569698B2 ## CPC - G01J 5/10: using electric radiation detectors - G01J 5/0801: Means for wavelength selection or discrimination - G01J 5/0853: {having infrared absorbers other than the usual absorber layers deposited on infrared detectors like bolometers, wherein the heat propagation between the absorber and the detecting element occurs within a solid} - G01J 5/34: using capacitors, e.g. pyroelectric capacitors - G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N) ## Abstract A thermal detector has a thermal detection element in which a physical characteristic changes based on temperature, a light-absorbing member configured and arranged to collect heat and transmit collected heat to the thermal detection element, a support member mounting the thermal detection element on a first side with a second surface facing a cavity, and a support part supporting a portion of the support member. The light-absorbing member is a plate shaped member at least partially contacting a top part of the thermal detection element and having a portion overhanging to an outside from the top part of the thermal detection element in plan view. ## Claims ### Claim 1 A thermal detector comprising: a thermal detection element that changes physical characteristics according to temperature; a light-absorbing member configured and arranged to collect heat and to transmit collected heat to the thermal detection element, the light-absorbing member being a plate shaped member at least partially contacting a top part of the thermal detection element and having a portion overhanging to an outside from the top part of the thermal detection element in plan view; a support member including a first side and a second side opposite from the first side with the thermal detection element being mounted on the first side and the second side facing a cavity, and the thermal detection element being disposed between the support member and the light-absorbing member; and a support part supporting and linking to a portion of the second side of the support member. ### Claim 2 (depends on 1) The thermal detector according to claim 1, wherein the thermal detection element is a pyroelectric detection element including a capacitor that changes an amount of polarization according to temperature, the capacitor including a first electrode, a second electrode, and a pyroelectric body disposed between the first electrode and the second electrode, and the light-absorbing member has a surface area greater than a surface area of the capacitor of the pyroelectric detection element in plan view. ### Claim 3 (depends on 2) The thermal detector according to claim 2, wherein the pyroelectric detection element further includes a protective layer protecting an outer surface of the capacitor with the protective layer forming a contact hole passing through to the second electrode, a plug filling the contact hole and having both electrical conduction properties and heat transfer properties, and a wiring layer formed in a prescribed pattern on the protective layer and the plug, and the light-absorbing member is linked to the second electrode via the plug and the wiring layer. ### Claim 4 (depends on 3) The thermal detector according to claim 3, wherein the pyroelectric detection element further includes a first reducing gas barrier layer disposed between the protective layer and an outer surface of the capacitor, and a second reducing gas barrier layer covering the protective layer and the wiring layer. ### Claim 5 (depends on 3) A thermal detection device comprising: a plurality of the thermal detectors according to claim 3 arranged in two dimensions along two intersecting axes. ### Claim 6 (depends on 3) The thermal detector according to claim 3, wherein the plug is in contact with a region of the second electrode constituting 50% or more of a surface area of the second electrode in plan view. ### Claim 7 (depends on 6) A thermal detection device comprising: a plurality of the thermal detectors according to claim 6 arranged in two dimensions along two intersecting axes. ### Claim 8 (depends on 2) The thermal detector according to claim 2, wherein the pyroelectric detection element further includes a protective layer covering a side surface of the capacitor and a portion of a top part of the capacitor with the protective layer forming a contact hole in a position corresponding to the top part of the capacitor, a plug filling the contact hole and having electrical conduction properties, and a wiring layer formed in a prescribed pattern on the protective layer and the plug, and the light-absorbing member covers, in plan view, the capacitor in a region other than a wiring contact region in which the plug and the wiring layer covering the plug are disposed. ### Claim 9 (depends on 8) The thermal detector according to claim 8, wherein the wiring contact region is disposed in a position away from a center position of the second electrode in plan view. ### Claim 10 (depends on 8) The thermal detector according to claim 8, wherein the pyroelectric detection element further includes a first reducing gas barrier layer disposed between the protective layer and an outer surface of the capacitor, a second reducing gas barrier layer covering the protective layer and the wiring layer, and a third reducing gas barrier layer disposed between the light-absorbing member and a region of a top surface of the second electrode not covered by the protective layer. ### Claim 11 (depends on 2) A thermal detection device comprising: a plurality of the thermal detectors according to claim 2 arranged in two dimensions along two intersecting axes. ### Claim 12 (depends on 1) The thermal detector according to claim 1, wherein the light-absorbing member includes a plate-shaped support layer covering the top part of the thermal detection element and overhanging to the outside from the top part of the thermal detection element in plan view, and a heat collection layer formed on the support layer. ### Claim 13 (depends on 12) A thermal detection device comprising: a plurality of the thermal detectors according to claim 12 arranged in two dimensions along two intersecting axes. ### Claim 14 (depends on 1) The thermal detector according to claim 1, wherein the thermal detection element is a pyroelectric detection element including a capacitor that changes an amount of polarization according to temperature, the capacitor including a first electrode, a second electrode, and a pyroelectric body disposed between the first electrode and the second electrode, and the light-absorbing member includes a plate-shaped support layer covering a top part of the second electrode and overhanging to an outside from the top part of the second electrode with the support layer having a surface area greater than a surface area of the capacitor in plan view, and a heat collection layer formed on the support layer. ### Claim 15 (depends on 14) The thermal detector according to claim 14, wherein the support layer is made of electrically conductive material, and the pyroelectric detection element includes a protective layer covering a side surface of the capacitor, and a wiring layer formed in a prescribed pattern on the protective layer, the wiring layer being electrically connected to the second electrode via the support layer. ### Claim 16 (depends on 15) A thermal detection device comprising: a plurality of the thermal detectors according to claim 15 arranged in two dimensions along two intersecting axes. ### Claim 17 (depends on 14) A thermal detection device comprising: a plurality of the thermal detectors according to claim 14 arranged in two dimensions along two intersecting axes. ### Claim 18 (depends on 1) A thermal detection device comprising: a plurality of the thermal detectors according to claim 1 arranged in two dimensions along two intersecting axes. ### Claim 19 (depends on 18) An electronic instrument comprising: the thermal detection device according to claim 18. ### Claim 20 (depends on 1) An electronic instrument comprising: the thermal detector according to claim 1.