# US 8,569,677 B2 · Devices useful for vacuum ultraviolet beam characterization including a movable stage with a transmission grating and image detector > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,569,677 B2 - Document ID: US8569677B2 - Status: Granted - Kind: B2 - Application number: 12/843,773 - Filed: 2010-07-26 - Published: 2011-07-28 - Granted: 2013-10-29 - Earliest claimed: 2008-01-25 - Assignees: The Regents of the University of California - Applicants: Oliver Gessner; Oleg A. Kornilov; Russell B. Wilcox - Inventors: Oliver Gessner; Oleg A. Kornilov; Russell B. Wilcox - Web page: https://patentgrep.com/patent/US8569677B2 ## CPC - G01J 1/4257: {applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam (monitoring arrangements for lasers in general H01S3/0014)} - G01J 1/04: Optical or mechanical part {supplementary adjustable parts} - G01J 1/0407: {Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings} - G01J 1/0414: {using plane or convex mirrors, parallel phase plates, or plane beam-splitters} - G01J 1/0448: {Adjustable, e.g. focussing} - G01J 1/429: {applied to measurement of ultraviolet light (using counting tubes G01T)} - G01J 1/58: using luminescence generated by light - G01J 3/02: Details - G01J 3/021: {using plane or convex mirrors, parallel phase plates, or particular reflectors} - G01J 3/0245: {using an optical amplifier of light, e.g. doped fiber} - G01J 3/2803: {using photoelectric array detector} - G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N) ## Abstract The invention provides for a device comprising an apparatus comprising (a) a transmission grating capable of diffracting a photon beam into a diffracted photon output, and (b) an image detector capable of detecting the diffracted photon output. The device is useful for measuring the spatial profile and diffraction pattern of a photon beam, such as a vacuum ultraviolet (VUV) beam. ## Claims ### Claim 1 An apparatus for characterizing a photon beam comprising: a movable stage, a transmission grating configured to diffract the photon beam into a diffracted photon output, an image detector configured to detect the diffracted photon output, a reflective surface, and an image recorder, wherein the transmission grating, the image detector, and the reflective surface are each connected to the movable stage, wherein the movable stage is configured to be positioned in a first position and a second position, wherein in the first position the photon beam bypasses the apparatus, and wherein in the second position the photon beam contacts the transmission grating. ### Claim 2 (depends on 1) The apparatus of claim 1, wherein the apparatus is an in-vacuum apparatus. ### Claim 3 (depends on 1) The apparatus of claim 1, wherein the image detector comprises a multi-channel plate (MCP) and a phosphor screen, wherein the phosphor screen is configured to convert the diffracted photon output into a visible image. ### Claim 4 (depends on 1) The apparatus of claim 1, further comprising: a vertical slit aperture whereby the photon beam passes through the vertical slit aperture prior to contacting the transmission grating. ### Claim 5 (depends on 1) The apparatus of claim 1, wherein the movable stage is configured to be movable relative to the photon beam in two directions in at least one dimension. ### Claim 6 (depends on 5) The apparatus of claim 5, wherein the apparatus is configured to be in a vacuum, and wherein the movable stage is configured to be controlled from outside the vacuum. ### Claim 7 (depends on 5) The apparatus of claim 5, wherein the movable stage is a piezo driven linear stage. ### Claim 8 (depends on 3) The apparatus of claim 3, wherein the image recorder is configured to record the visible image. ### Claim 9 (depends on 8) The apparatus of claim 8, wherein the image recorder is a camera. ### Claim 10 (depends on 1) The apparatus of claim 1, wherein the reflective surface is positioned such that the reflective surface directs the visible image to the image recorder. ### Claim 11 (depends on 1) The apparatus of claim 1, wherein the reflective surface is a mirror. ### Claim 12 (depends on 1) A vacuum assembly comprising a vacuum chamber, a light source, and the apparatus of claim 1, wherein the apparatus is located in the vacuum chamber. ### Claim 13 (depends on 1) The apparatus of claim 1, wherein the movable stage is further configured to be positioned in a third position, wherein in the third position the photon beam bypasses the transmission grating and contacts the image recorder. ### Claim 14 A method for characterizing a photon beam, comprising: (a) generating the photon beam, (b) providing an apparatus, the apparatus comprising: a movable stage, a transmission grating configured to diffract the photon beam into a diffracted photon output, an image detector configured to detect the diffracted photon output, a reflective surface, and an image recorder, wherein the transmission grating, the image detector, and the reflective surface are each connected to the movable stage, (c) moving the movable stage from a first position where the photon beam bypasses the apparatus into a second position where the photon beam contacts the transmission grating, and (d) recording the diffracted photon output from the transmission grating with the image recorder. ### Claim 15 (depends on 14) The method of claim 14, further comprising: (e) moving the movable stage to a third position where the photon beam bypasses the transmission grating and contacts the image recorder.