# US 8,569,648 B2 · Apparatus and system for improving depth of focus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,569,648 B2 - Document ID: US8569648B2 - Status: Granted - Kind: B2 - Application number: 12/966,501 - Filed: 2010-12-13 - Published: 2012-05-24 - Granted: 2013-10-29 - Earliest claimed: 2010-11-18 - Assignees: Industrial Technology Research Institute - Applicants: Chun-Ming Chen; Sung-Ho Liu; Jie-Ting Tseng; Min-Kai Lee; Ying-Hui Yang - Inventors: Chun-Ming Chen; Sung-Ho Liu; Jie-Ting Tseng; Min-Kai Lee; Ying-Hui Yang - Web page: https://patentgrep.com/patent/US8569648B2 ## CPC - G02B 27/0075: {with means for altering, e.g. increasing, the depth of field or depth of focus} - B23K 26/046: Automatically focusing the laser beam - B23K 26/0648: {comprising lenses} - B23K 26/0823: {Devices involving rotation of the workpiece} - B23K 26/0861: {in at least three axial directions} - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - B23K: SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM ## Abstract The present invention provides an apparatus and a system for improving depth of focus (DOF), wherein an optical lens for optical processing is actuated to vibrate whereby the DOF of the optical processing is increased due to the variation of focal point. In the embodiment of the present invention, an actuator is coupled to the optical lens for providing vibration energy wherein the optical lens is actuated by the vibration energy so as to vibrate on an optical axis thereof so as to increase the DOF during the optical processing, thereby improving the quality and efficiency of optical processing. ## Claims ### Claim 1 An optical apparatus for improving a depth of focus (DOF) thereof, comprising: an optical lens module; and an actuator, coupled to the optical lens module; wherein the actuator is actuated by a driving signal, from a control unit, for issuing a vibration frequency to the optical lens module for controlling the same to vibrate on an optical axis of the optical lens module, wherein the optical lens module is a refractive lens module that comprises: a diverging lens unit coupled to the actuator for enabling the actuator, based upon the driving signal, to cause the diverging lens unit to vibrate on the optical axis of the optical lens module to increase the DOF; and a condensing lens unit disposed apart from the diverging lens unit by a distance so as to be used for focusing a beam that passes through the diverging lens unit and then projected onto the condensing lens unit. ### Claim 2 (depends on 1) The optical apparatus of claim 1, wherein the diverging lens unit is configured with at least one concave surface, while the condensing lens unit is configured with at least one convex surface. ### Claim 3 (depends on 1) The optical apparatus of claim 1, wherein the vibration frequency is in a range between 1 Hz and 100 MHz. ### Claim 4 (depends on 1) The optical apparatus of claim 1, wherein the actuator is coupled to the optical lens module by an end thereof, while the actuator is further coupled to the control unit, provided for generating the driving signal for controlling the actuator. ### Claim 5 An optical system for improving depth of focus (DOF) thereof, comprising: a light source for emitting a beam to be used in a machining process; an optical lens module for focusing the beam; an actuator coupled to the optical lens module, wherein the actuator is actuated by a driving signal for issuing a vibration frequency to the optical lens module for controlling the same to vibrate in a specific vibration frequency on an optical axis of the optical lens module, causing the focus position of the beam to vary accordingly, and thus, causing the DOF of the optical system to increase; and a control unit that is for generating the driving signal for controlling the actuator, wherein the optical lens module is a refractive lens module that comprises: a diverging lens unit coupled to the actuator for enabling the actuator, based upon the driving signal, to cause the diverging lens unit to vibrate on the optical axis of the optical lens module to increase the DOF, the beam from the light source passing through the diverging lens unit; and a condensing lens unit disposed apart from the diverging lens unit so as to be used for focusing the beam from the light source that passes through the diverging lens unit and that is then projected onto the condensing lens unit. ### Claim 6 (depends on 5) The optical system of claim 5, wherein the diverging lens unit includes at least one diverging lens, each being configured with at least one concave surface, while the condensing lens unit includes at least one condensing lens, each being configured with at least one convex surface. ### Claim 7 (depends on 5) The optical system of claim 5, wherein the vibration frequency is in a range between 1 Hz and 100 MHz. ### Claim 8 (depends on 5) The optical system of claim 5, wherein the actuator is coupled to the optical lens module by an end thereof, while the actuator is further coupled to the control unit. ### Claim 9 (depends on 5) The optical system of claim 5, wherein the wavelength of the beam used in the machining process is in a range between 100 nm and 20 μm. ### Claim 10 (depends on 5) The optical system of claim 5, wherein the light source is substantially a laser light source. ### Claim 11 (depends on 5) The optical system of claim 5, further comprising: a machining platform for carrying a substrate while allowing the beam to focus on the substrate for machining the substrate. ### Claim 12 (depends on 11) The optical system of claim 11, further comprising a driving device provided for powering and thus driving the machining platform, wherein the machining platform is further coupled to the driving device. ### Claim 13 (depends on 5) The optical system of claim 5, being configured for enabling the distance between the diverging lens unit and the condensing lens unit to be adjustable for enabling a focal length of the condensing lens unit to vary accordingly.