# US 8,569,151 B2 · Method of formation of nanowires and method of manufacture of associated optical component

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 8,569,151 B2
- Document ID: US8569151B2
- Status: Granted
- Kind: B2
- Application number: 13/147,081
- Filed: 2010-01-28
- Published: 2012-01-26
- Granted: 2013-10-29
- Earliest claimed: 2009-01-30
- Assignees: Commissariat A L'energie Atomique Et Aux Energies Alternatives
- Applicants: Delphine Neel; Pierre Ferret; Stéphane Getin
- Inventors: Delphine Neel; Pierre Ferret; Stéphane Getin
- Web page: https://patentgrep.com/patent/US8569151B2

## CPC

- C30B 29/60: characterised by shape
- C30B 11/12: Vaporous components, e.g. vapour-liquid-solid-growth
- C30B: SINGLE-CRYSTAL GROWTH (by using ultra-high pressure, e.g. for the formation of diamonds, B01J3/06); UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL (zone-refining of metals or alloys C22B); PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (casting of metals, casting of other substances by the same processes or devices B22D; working of plastics B29; modifying the physical structure of metals or alloys C21D, C22F); SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (for producing semiconductor devices or parts thereof H10); APPARATUS THEREFOR

## Abstract

A method of formation of nanowires at a surface of a substrate attached to a solid immersion lens. The method includes formation of a catalyst element at the surface of the substrate and growth of nanowires from the catalyst element formed at the surface of the substrate. The catalyst element is a metal nanoparticle and the formation of the catalyst element at the surface of the substrate deposits the metal nanoparticle using a light beam focused by the solid immersion lens at the surface of the substrate.

## Claims

### Claim 1

A method of formation of nanowires at a surface of a substrate attached to a flat face of a solid immersion lens, the method comprising:
forming at least one catalyst element at the surface of the substrate; and
growing nanowires from each catalyst element formed at the surface of the substrate, wherein, with the catalyst element being a metal nanoparticle and with the substrate being transparent at an operating wavelength,
the forming the catalyst element at the surface of the substrate includes:
bringing the substrate into contact with a fluid placed in a tank that contains metal nanoparticles;
focusing a light beam at the operating wavelength in an area of the substrate, using an incident light beam on a hemispherical face of the solid immersion lens;
moving the tank until a metal nanoparticle is trapped in the focused light beam; and
attaching the trapped metal nanoparticle on the substrate.

### Claim 2 (depends on 1)

A method of formation of nanowires according to claim 1, in which, with the fluid being a liquid that fills the tank, once the metal nanoparticle is attached to the substrate, the tank is disassembled and the substrate is dried during a drying step.

### Claim 3 (depends on 1)

A method of formation of nanowires according to claim 1, in which, with the fluid being air which fills the tank, the metal nanoparticles are introduced into the tank using an atomiser and, provided at least one metal nanoparticle is attached on the substrate, the tank is disassembled.

### Claim 4 (depends on 1)

A method of formation of nanowires according to claim 1, in which the metal nanoparticle is attached by fusion to the surface of the substrate.

### Claim 5 (depends on 1)

A method of formation of nanowires according to claim 1, in which the substrate is previously covered with a surface treatment to facilitate attachment of the trapped metal nanoparticle to the substrate.

### Claim 6 (depends on 5)

A method of formation of nanowires according to claim 5, in which the surface treatment is a treatment with poly-L-lysine or a treatment by aminosilane.

### Claim 7 (depends on 6)

A method of formation of nanowires according to claim 6, in which the surface treatment is removed before the growing the nanowires.

### Claim 8 (depends on 6)

A method of formation of nanowires according to claim 6, in which the surface treatment is removed after the growing the nanowires.

### Claim 9 (depends on 5)

A method of formation of nanowires according to claim 5, in which the surface treatment is removed before the growing the nanowires.

### Claim 10 (depends on 5)

A method of formation of nanowires according to claim 5, in which the surface treatment is removed after the growing the nanowires.

### Claim 11 (depends on 1)

A method of manufacture of an optical component including a solid immersion lens and at least one nanowire coupled to the solid immersion lens, the method comprising:
forming the at least one nanowire on a flat face of the solid immersion lens,
wherein the forming the at least one nanowire is accomplished using the method of accordance with claim 1.