Thin film transistor liquid crystal display array substrate and manufacturing method thereof

A method of manufacturing a TFT LCD array substrate, comprising the steps of:

• 1) forming a thin film transistor on a substrate, comprising forming a gate line and a gate electrode connected with the gate line on the substrate, a gate insulating layer, a semiconductor layer on the gate electrode, and an ohmic contact layer on the semiconductor layer;
• 2) forming a transparent pixel electrode layer and a source/drain electrode metal layer in sequence on the resultant substrate, wherein the transparent pixel electrode layer is electrically insulated from the gate line and the gate electrode, and the transparent pixel electrode layer establishes an ohmic contact with two sides of the semiconductor layer via the ohmic contact layer;
• and
• 3) performing masking and etching with a gray tone mask with respect to the resultant substrate to form a transparent pixel electrode, a source/drain electrode, and a data line simultaneously,
• wherein a partially transparent portion of the gray tone mask corresponds to the transparent pixel electrode to be formed, a opaque portion of the gray tone mask to the source/drain electrode and the data line to be formed, and a transparent portion of the gray tone mask to remaining portion of the substrate.