Method for manufacturing photoelectric conversion device

A method for manufacturing a photoelectric conversion device, comprising the steps of:

• forming a first-conductivity-type crystalline semiconductor region that includes a crystalline semiconductor region and a plurality of whiskers including a crystalline semiconductor by a low pressure chemical vapor deposition method using a deposition gas containing silicon and a gas imparting the first conductivity type as a source gas at a temperature higher than 550° C. and lower than 650° C. over a conductive layer;
• forming an intrinsic crystalline semiconductor region by a low pressure chemical vapor deposition method using a deposition gas containing silicon as a source gas at a temperature higher than 550° C. and lower than 650° C. over the first-conductivity-type crystalline semiconductor region, and also moving an impurity element imparting the first conductivity type from the first-conductivity-type crystalline semiconductor region toward the intrinsic crystalline semiconductor region;
• and
• forming a second-conductivity-type crystalline semiconductor region by a low pressure chemical vapor deposition method using a deposition gas containing silicon and a gas imparting the second conductivity type as a source gas at a temperature lower than or equal to 550° C. or higher than or equal to 650° C. over the intrinsic crystalline semiconductor region.

A method for manufacturing a photoelectric conversion device, comprising the steps of:

• forming a first-conductivity-type crystalline semiconductor region over a conductive layer;
• forming an intrinsic crystalline semiconductor region including a crystalline semiconductor region and a plurality of whiskers including a crystalline semiconductor over the first-conductivity-type crystalline semiconductor region, and also moving an impurity element imparting the first conductivity type from the first-conductivity-type crystalline semiconductor region toward the intrinsic crystalline semiconductor region;
• and
• forming a second-conductivity-type crystalline semiconductor region over the intrinsic crystalline semiconductor region.

A method for manufacturing a photoelectric conversion device, comprising the steps of:

• forming a first-conductivity-type crystalline semiconductor region that includes a crystalline semiconductor region and a plurality of whiskers including a crystalline semiconductor over a conductive layer;
• forming an intrinsic crystalline semiconductor region over the first-conductivity-type crystalline semiconductor region, and also moving an impurity element imparting the first conductivity type from the first-conductivity-type crystalline semiconductor region toward the intrinsic crystalline semiconductor region;
• and
• forming a second-conductivity-type crystalline semiconductor region over the intrinsic crystalline semiconductor region.