Method of making light emitting diode
AssigneesTsinghua University, Hon Hai Precision Industry Co., Ltd.
InventorsYang Wei, Shou-Shan Fan
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Abstract
A method of making a LED includes following steps. A substrate is provided, and the substrate includes an epitaxial growth surface. A buffer layer is grown on the epitaxial growth surface. A carbon nanotube layer is placed on the buffer layer. A first semiconductor layer, an active layer, and a second semiconductor layer are grown in that order on the buffer layer. A reflector and a first electrode are deposited on the second semiconductor layer in that order. The substrate and the buffer layer are removed. A second electrode is deposited on the first semiconductor layer.
Claims15
A method of making a light emitting diode, comprising:
- providing a substrate having an epitaxial growth surface;
- growing a buffer layer on the epitaxial growth surface;
- placing a carbon nanotube layer on the buffer layer;
- growing a first semiconductor layer, an active layer, and a second semiconductor layer in that order on the substrate, wherein the first semiconductor layer covers on the carbon nanotube layer;
- applying a reflector and a first electrode on a surface of the second semiconductor layer;
- removing the substrate and the buffer layer to expose the carbon nanotube layer;
- and
- applying a second electrode electrically connected with the carbon nanotube layer.
Dependencies are inferred from the claim text.