# US 8,568,959 B2 · Techniques for reducing degradation and/or modifying feature size of photomasks

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- Number: US 8,568,959 B2
- Document ID: US8568959B2
- Status: Granted
- Kind: B2
- Application number: 12/244,903
- Filed: 2008-10-03
- Published: 2010-04-08
- Granted: 2013-10-29
- Earliest claimed: 2008-10-03
- Assignees: International Business Machines Corporation
- Applicants: Peter H. Bartlau; Thomas B. Faure; Alfred Wagner
- Inventors: Peter H. Bartlau; Thomas B. Faure; Alfred Wagner
- Web page: https://patentgrep.com/patent/US8568959B2

## CPC

- G03F 7/70916: {Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps}
- G03F 1/32: Attenuating PSM [att-PSM], e.g. halftone PSM or PSM having semi-transparent phase shift portion,; Preparation thereof
- G03F 1/54: Absorbers, e.g. of opaque materials
- G03F 1/68: Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F 1/72: Repair or correction of mask defects
- G03F 7/70866: {of mask or workpiece}
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)

## Abstract

A photomask includes a light transmitting substrate and an absorber layer adjacent thereto. The absorber layer includes a silicide, such as molybdenum silicide, patterned into a plurality of features. The surrounding environment is controlled to prevent undesirable growth by oxidation of the absorber layer when the mask is exposed to light while being used to fabricate integrated circuits. In another aspect, the surrounding environment is controlled to encourage desirable growth by oxidation of the absorber layer when the mask is exposed to light.

## Claims

### Claim 1

A method comprising the steps of:
obtaining a photomask comprising a light transmitting substrate and an absorber layer adjacent thereto, said absorber layer comprising a silicide patterned into a plurality of features;
mounting said photomask into a stepper apparatus for use in an integrated circuit fabrication process; and
during said integrated circuit fabrication process, irradiating said photomask with radiation of less than about 240 nm in wavelength in an atmosphere comprising a substantially dry inert gas and a substantial absence of water vapor;
whereby growth of said absorber layer by oxidation is substantially inhibited.

### Claim 2 (depends on 1)

The method of claim 1, wherein said silicide comprises molybdenum silicide.

### Claim 3 (depends on 2)

The method of claim 2, wherein said substantially dry inert gas comprises substantially dry argon.

### Claim 4 (depends on 2)

The method of claim 2, wherein said substantially dry inert gas comprises substantially dry nitrogen.

### Claim 5

A method comprising the steps of:
obtaining a photomask comprising a light transmitting substrate and an absorber layer adjacent thereto, said absorber layer comprising a silicide patterned into a plurality of features;
mounting said photomask into a stepper apparatus for use in an integrated circuit fabrication process;
during said integrated circuit fabrication process, irradiating said photomask with radiation of greater than about 100 nm and less than about 240 nm in wavelength in a vacuum environment having a substantial absence of water vapor;
whereby growth of said absorber layer by photo-chemistry induced oxidation is substantially inhibited.

### Claim 6 (depends on 5)

The method of claim 5, wherein said silicide comprises molybdenum silicide.

### Claim 7 (depends on 6)

The method of claim 6, wherein said vacuum environment comprises an ambient pressure of no more than about ten percent of standard atmospheric pressure.

### Claim 8 (depends on 6)

The method of claim 6, wherein said vacuum environment comprises an ambient pressure of no more than about one percent of standard atmospheric pressure.

### Claim 9

A method comprising the steps of:
obtaining a photomask for use in an integrated circuit fabrication process, said photomask comprising a light transmitting substrate and an absorber layer adjacent thereto, said absorber layer comprising a silicide patterned into a plurality of features, said photomask having a required lifetime;
taking into account an effect of ambient humidity on oxidation of said absorber layer during said integrated circuit fabrication process over said required lifetime, to obtain a humidity value consistent with said required lifetime, wherein taking into account comprises irradiating a plurality of regions on at least one test photomask substantially similar to said photomask for use in said integrated circuit fabrication process with progressively larger doses of photons, and repeating the progressively larger doses at a plurality of test ambient humidity values;
mounting said photomask into a stepper apparatus for use in said integrated circuit fabrication process; and
during said integrated circuit fabrication process, irradiating said photomask with radiation of less than about 240 nm in wavelength in an environment consistent with said humidity value;
whereby growth of said absorber layer by oxidation is substantially inhibited to aid in achieving said required lifetime.

### Claim 10 (depends on 9)

The method of claim 9, wherein said silicide comprises molybdenum silicide.

### Claim 11 (depends on 10)

The method of claim 10, wherein said step of taking into account comprises:
determining applicable values of (i) a constant, c, dependent on a material of said absorber layer, and (ii) an exponent, a; and
applying a first equation and a second equation to obtain said humidity value, H, consistent with said required lifetime,
said first equation being:
G=K*√{square root over (D)}
where:
G is allowable increase in feature size due to growth of said absorber layer by oxidation during said required lifetime,
K is a constant dependent on absorber material and gas composition, and
D is total exposure dose in energy per unit area during said required lifetime,
said second equation being:
K=c*Ha

### Claim 12 (depends on 11)

The method of claim 11, wherein said step of determining said applicable values comprises:
measuring growth of sets of features on the at least one test photomask for the plurality of progressively larger doses per unit area and the plurality of test ambient humidity values, to obtain a data set; and
carrying out a curve fit to said data set, using said first and second equations, to determine said applicable values of c and a.

### Claim 13

A method comprising the steps of:
determining that, for a photomask comprising a light transmitting substrate and an absorber layer adjacent thereto, said absorber layer comprising a silicide patterned into a plurality of features, it is desirable to cause growth of said absorber layer to change a size of at least one of said plurality of features to a target size;
responsive to said determining, irradiating at least a portion of said photomask adjacent said at least one of said plurality of features with radiation of less than about 240 nm in wavelength in presence of an oxidizing environment from a laser beam of a broadband laser, to cause said growth of said absorber layer with concomitant change of said size of said at least one of said plurality of features to substantially conform to said target size.

### Claim 14 (depends on 13)

The method of claim 13, wherein said silicide comprises molybdenum silicide.

### Claim 15 (depends on 14)

The method of claim 14, wherein said oxidizing environment comprises hydrogen peroxide.

### Claim 16 (depends on 14)

The method of claim 14, wherein said oxidizing environment comprises hydroxide.

### Claim 17 (depends on 14)

The method of claim 14, wherein said oxidizing environment comprises substantially pure oxygen.

### Claim 18 (depends on 14)

The method of claim 14, wherein said oxidizing environment comprises ozone.

### Claim 19 (depends on 14)

The method of claim 14, wherein said oxidizing environment comprises water vapor.

### Claim 20 (depends on 14)

The method of claim 14, wherein said irradiating step is carried out locally to cause change of a subset of said features by focusing the laser beam to a particular area of the photomask.

### Claim 21 (depends on 14)

The method of claim 14, wherein said irradiating step is carried out by applying the laser beam across substantially an entire surface of said photomask to cause change of substantially all said features.

### Claim 22 (depends on 14)

The method of claim 14, wherein said oxidizing environment comprises moist air having a relative humidity value, H, sufficient to cause said growth in a desired time under an available radiation power density.

### Claim 23 (depends on 22)

The method of claim 22, further comprising the additional step of determining H by:
determining applicable values of (i) a constant, c, dependent on a material of said absorber layer, and (ii) an exponent, a; and
applying a first equation and a second equation, said first equation being:
G=K*√{square root over (D)}
where:
G is desired increase in feature size due to growth of said absorber layer by oxidation during said desired time,
K is a constant dependent on absorber material and gas composition, and
D is total exposure dose in energy per unit area during said desired time,
said second equation being:
K=c*Ha

### Claim 24 (depends on 23)

The method of claim 23, wherein said step of determining said applicable values comprises:
measuring growth of sets of features on at least one test photomask substantially similar to said photomask for which it is desired to cause said growth, for a plurality of test energy doses per unit area and a plurality of test ambient humidity values, to obtain a data set; and
carrying out a curve fit to said data set, using said first and second equations, to determine said applicable values of c and a.