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US 8,568,828 B2Granted
Amorphous tin-cadmium oxide films and the production thereof
AssigneeAlliance for Sustainable Energy, LLC
InventorsXiaonan Li, Timothy A. Gessert
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Abstract
A tin-cadmium oxide film having an amorphous structure and a ratio of tin atoms to cadmium atoms of between 1:1 and 3:1. The tin-cadmium oxide film may have an optical band gap of between 2.7 eV and 3.35 eV. The film may also have a charge carrier concentration of between 1×1020 cm−3 and 2×1020 cm−3. The tin cadmium oxide film may also exhibit a Hall mobility of between 40 cm2V−1 s−1 and 60 cm2V−1 s−1. Also disclosed is a method of producing an amorphous tin-cadmium oxide film as described and devices using same.
Claims10
A method of producing a tin-cadmium oxide film comprising:
- introducing a tin precursor in a carrier gas into a low pressure deposition chamber having a chamber temperature of between 500° C. and 550° C.;
- introducing a cadmium precursor in a carrier gas into the low pressure deposition chamber;
- introducing oxygen into the low pressure deposition chamber;
- and
- depositing a tin-cadmium oxide material onto a substrate wherein the tin-cadmium oxide material comprises an amorphous structure and a ratio of tin atoms to cadmium atoms of between 1:1 and 3:1.
2 more elements
Dependencies are inferred from the claim text.