Apparatus and method incorporating discrete passive components in an electronic package
AssigneeAtmel Corporation
InventorKen M. Lam
Life of this patent
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Abstract
An apparatus and method for incorporating discrete passive components into an integrated circuit package. A metal layer is formed over a surface of a substrate. A layer of photosensitive material is then formed over the metal layer. Using standard photolithographic processing, a pattern is formed with the photosensitive material to expose at least one region of the metal layer. The remaining photosensitive material protects the underlying metal during metal etching. The substrate is then subjected to a metal etching process to remove the metal that is not protected by the photosensitive material. The remaining photosensitive material is then removed from each remaining area of the metal layer. The discrete passive components can then be attached to the formed metal lands.
Claims12
A method of fabrication comprising;
- forming a dielectric insulation layer over a passivation layer formed on a surface of a substrate having circuitry formed therein;
- forming a metal layer over the dielectric insulation layer;
- forming a layer of photosensitive material over the metal layer;
- forming a pattern with the photosensitive material to expose at least one region of the metal layer;
- removing the at least one exposed region of the metal layer using the pattern of photosensitive material as a mask, the removal of the at least one exposed region of the metal layer exposing at least one region of the dielectric insulation layer;
- removing the at least one exposed region of the dielectric insulation layer;
- and
- removing remaining photosensitive material from each remaining area of the metal layer for forming a structure to which a leadframe of an electronic package and an electronic component may be attached, wherein forming the structure comprises forming a bond pad to accept at least two bonds including a first bond to couple the structure to the electronic component and a second bond to couple the structure to a package lead of the leadframe of the electronic package, wherein the package lead is not formed over a surface of the substrate.
Dependencies are inferred from the claim text.