Sputtering target of nonmagnetic-particle-dispersed ferromagnetic material
AssigneeJX Nippon Mining & Metals Corporation
InventorAtsushi Sato
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AssigneeJX Nippon Mining & Metals Corporation
InventorAtsushi Sato
Estimating the term…
Provided is a sputtering target of nonmagnetic-particle-dispersed ferromagnetic material comprising a phase (A) such that nonmagnetic particles are dispersed in a ferromagnetic material formed from a Co—Cr alloy containing 5 at % or more and 20 at % or less of Cr and Co as the remainder thereof, and schistose textures (B) with a short side of 30 to 100 μm and a long side of 50 to 300 μm formed from a Co—Cr alloy phase in the phase (A); wherein each of the foregoing nonmagnetic particles has such a shape and size that the particle is smaller than all hypothetical circles with a radius of 1 μm around an arbitrary point within the nonmagnetic particle, or a shape and size with at least two contact points or intersection points between the respective hypothetical circles and the interface of the ferromagnetic material and the nonmagnetic material.
A sintered sputtering target comprising a ferromagnetic alloy dispersed with nonmagnetic oxide particles characterized in that:
A sputtering target, comprising a sintered body of a mixture of nonmagnetic oxide particles and a ferromagnetic alloy consisting of 5 to 20 at % Cr, 5 to 30 at % Pt, and remainder Co, the nonmagnetic oxide particles and schistose Co—Cr—Pt alloy particles being dispersed within a matrix of the ferromagnetic alloy of the sintered body, the schistose Co—Cr—Pt alloy particles each having a short side length dimension of 30 to 100 μm and a long side length dimension of 50 to 300 μm, and Cr being concentrated to 25 at % or more at a central part of each of the schistose Co—Cr—Pt alloy particles and is lower in concentration at a periphery of each of the schistose Co—Cr—Pt alloy particles.
Dependencies are inferred from the claim text.