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US 8,559,770 B2Granted
Fabry-perot optical sensor and method of manufacturing the same
AssigneeFISO Technologies Inc.
InventorsDenis Donlagic, Edvard Cibula, Éric Pinet
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Abstract
A Fabry-Perot optical sensor for sensing a parameter such as pressure or the like is provided. The sensor includes a lead optical fiber from the end of which projects a spacer having an end surface curving inwardly. A diaphragm extends across the forward end of the spacer. The diaphragm is flexible in response to the parameter to be measured and defines a forward reflector of the Fabry-Perot cavity within the optical sensor. A method for manufacturing such a sensor is also provided.
Claims30
A Fabry-Perot optical sensor for sensing a parameter, the optical sensor comprising:
- a lead optical fiber having front and rear ends;
- the front end of the lead optical fiber having a footprint;
- a spacer carried on the front end of the lead optical fiber and contained within the footprint thereof;
- the spacer having front and rear margins and a body extending between the front and rear margins;
- the body having formed in the front margin a Fabry-Perot cavity extending toward the rear margin;
- the Fabry-Perot cavity having a profile selected from the group consisting of:
- (a) a semi-circular profile;
- (b) a parabolic profile;
- and (c) a truncated parabolic profile;
- and
- a diaphragm attached to the front margin of the spacer and extending across the Fabry-Perot cavity;
- the diaphragm being flexible in response to changes in the parameter;
- the diaphragm defining a forward reflector of the Fabry-Perot cavity.
10 more elements
Dependencies are inferred from the claim text.