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US 8,559,471 B2Granted
High-power diode end-pumped solid-state UV laser
OwnerGuilin Maoinventor
Life of this patent
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Abstract
A high-power diode end-pumped solid-state UV laser comprises high-power fiber-coupled end pumping laser diodes, a specially designed fundamental laser cavity and multiple high-power high-efficiency harmonic generations. Nonuniform fundamental laser cavity has to be used, i.e. the beam size of the fundamental laser cannot be uniform in the fundamental cavity. Thermal transfer inside the laser crystal and harmonic crystal has to be specially and carefully treated, and special crystal mounts were designed to optimize the thermal contact and maximize the heat transfer. In addition, harmonic crystal mounts were specially designed to minimize the loss and protect the hydroscopic crystals.
Claims35
A high-power diode end-pumped solid-state laser and its UV and deep-UV harmonic generations comprising:
- a. One or multiple fiber-coupled laser diodes as end pumps, wherein the pumping light of said laser diode can be split into two beams by a polarization beam splitter, the transmitted light from said beam splitter is horizontally polarized and pumps said laser crystal from one end, the reflected light from said beam splitter is vertically polarized and rotates its polarization by 90° after passing through a half wave plate and pumps said laser crystal from the other end;
- b. A laser crystal, said laser crystal can be Nd:YAG, Nd:YVO4, Gd:WO4, or Nd:YLF, which absorbs the light of said pumps and converts it into a fundamental laser light;
- c. One or multiple pairs of pump lens, said pump lens pair or pairs are arranged in a telescope way to image the light of said pumps on one end or both ends of said laser crystal;
- d. A fundamental laser cavity with two high-reflection end mirrors and multiple high-reflection folding mirrors, said end mirror means the reflected light reversely follows the path of the incident light after it is reflected by said end mirror, said folding mirror means the reflected light doesn't follow the path of the incident light after it is reflected by said folding mirror;
- e. A Q-switch in said fundamental laser cavity, said Q-switch is an electro-optic or acoustic-optical Q-switch;
- f. An intracavity SHG crystal converting said fundamental laser light into SHG laser light;
- g. a SHG laser cavity, said SHG cavity has two end mirrors having high reflection for said SHG laser light, said SHG laser cavity can share one end mirror with said fundamental laser cavity;
- h. One or multiple THG, FHG and 5HG harmonic crystals, said crystals convert said SHG laser light and said fundamental laser light into UV or deep UV laser lights;
- and
- i. One or multiple mirrors separating said UV or deep-UV laser light from said fundamental laser light and SHG laser light.
7 more elements
A high-power diode end-pumped solid-state laser and its UV and deep-UV harmonic generations, comprising:
- a. one or multiple fiber-coupled laser diodes as end pumps;
- b. a laser crystal, said laser crystal can be Nd:YAG, Nd:YVO4, Gd:WO4, or Nd:YLF, which absorbs the light of said pumps and converts it into a fundamental laser light;
- c. one or multiple pairs of pump lens, said pump lens pair or pairs are arranged in a telescope way to image the light of said pumps on one end or both ends of said laser crystal;
- d. a fundamental laser cavity with two high-reflection end mirrors and multiple high-reflection folding mirrors, said end mirror means the reflected light reversely follows the path of the incident light after it is reflected by said end mirror, said folding mirror means the reflected light doesn't follow the path of the incident light after it is reflected by said folding mirror;
- e. a Q-switch in said fundamental laser cavity, said Q-switch is an electro-optic or acoustic-optical Q-switch;
- f. an intracavity SHG crystal converting said fundamental laser light into SHG laser light;
- g. a SHG laser cavity, said SHG cavity has two end mirrors having high reflection for said SHG laser light, said SHG laser cavity can share one end mirror with said fundamental laser cavity;
- h. one or multiple THG, FHG and 5HG harmonic crystals, said crystals convert said SHG laser light and said fundamental laser light into UV or deep UV laser lights;
- i. one or multiple mirrors separating said UV or deep-UV laser light from said fundamental laser light and SHG laser light;
- and
- j. a Brewster roof mirror comprising two Brewster mirrors on a rotation stage, the input lights which are two or multiple mixed lights with different polarizations split after hitting the first Brewster mirror, the Polarization light transmits from the first Brewster mirror, the S polarization light reflects on the two Brewster mirrors which are coated with high reflection coating for the S polarization light.
8 more elements
A high-power diode end-pumped solid-state laser and its UV and deep-UV harmonic generations, comprising:
- a. one or multiple fiber-coupled laser diodes as end pumps;
- b. a laser crystal, said laser crystal can be Nd:YAG, Nd:YVO4, Gd:WO4, or Nd:YLF, which absorbs the light of said pumps and converts it into a fundamental laser light;
- c. one or multiple pairs of pump lens, said pump lens pair or pairs are arranged in a telescope way to image the light of said pumps on one end or both ends of said laser crystal;
- d. a fundamental laser cavity with two high-reflection end mirrors and multiple high-reflection folding mirrors, said end mirror means the reflected light reversely follows the path of the incident light after it is reflected by said end mirror, said folding mirror means the reflected light doesn't follow the path of the incident light after it is reflected by said folding mirror, wherein said fundamental laser cavity with nonpolarized laser crystal such as Nd:YAG can have four intracavity harmonic crystals, the first two crystals are SHG crystals and generate both horizontally and vertically polarized SHG laser lights, the third crystal is a type-II crystal such as LBO crystal and generates THG laser light, the fourth crystal is a 5HG type-I crystal and combines said THG laser light with its same polarization SHG laser light and generates 5HG laser light, said 5HG laser light can be separated and outputs through a Brewster roof mirror;
- e. a Q-switch in said fundamental laser cavity, said Q-switch is an electro-optic or acoustic-optical Q-switch;
- f. an intracavity SHG crystal converting said fundamental laser light into SHG laser light;
- g. a SHG laser cavity, said SHG cavity has two end mirrors having high reflection for said SHG laser light, said SHG laser cavity can share one end mirror with said fundamental laser cavity;
- h. one or multiple THG, FHG and 5HG harmonic crystals, said crystals convert said SHG laser light and said fundamental laser light into UV or deep UV laser lights;
- and
- i. one or multiple mirrors separating said UV or deep-UV laser light from said fundamental laser light and SHG laser light.
7 more elements
Dependencies are inferred from the claim text.