Air current generating apparatus and method for manufacturing same
AssigneeKabushiki Kaisha Toshiba
InventorsMotofumi Tanaka, Kazuo Hayashi, Naohiko Shimura, Hiroyuki Yasui, Masahiro Asayama, Yutaka Ishiwata, Masahiro Katayama
Life of this patent
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Abstract
In one embodiment, an air current generating apparatus includes: a dielectric substrate exposed to gas: a first electrode disposed inside the dielectric substrate; a second electrode disposed near a surface of the dielectric so as to correspond the first electrode and having a sharp shape; and a power source applying a voltage between the first and second electrodes and plasmatizing part of the gas to generate an air current.
Claims7
A method for manufacturing an air current generating apparatus which includes:
- a dielectric substrate exposed to gas;
- a first electrode disposed inside the dielectric substrate;
- and a second electrode disposed near a surface of the dielectric substrate so as to correspond to the first electrode and which applies a voltage between the first and second electrodes and plasmatizes part of the gas to generate an air current,
- the method comprising:
- preparing a conductor-clad dielectric plate including a dielectric plate having a first and a second principal surface and a conductive layer disposed on the first principal surface;
- and
- forming the first or second electrode by etching the conductive layer.
A method for manufacturing an air current generating apparatus which includes:
- a dielectric substrate exposed to gas;
- a first electrode disposed inside the dielectric substrate;
- and a second electrode disposed near a surface of the dielectric substrate so as to correspond to the first electrode, and which applies a voltage between the first and second electrodes and plasmatizes part of the gas to generate an air current,
- the method comprising:
- forming a pattern of the first or second electrode on a principal surface of an unbaked ceramics plate by using a conductive paste;
- and
- baking the unbaked ceramics plate to form a ceramics plate having the first or second electrode.
A method for manufacturing an air current generating apparatus which includes:
- a base member;
- a first electrode disposed on the base member;
- a dielectric layer covering the first electrode and exposed to gas;
- and a second electrode disposed on the dielectric layer or near a surface of the dielectric layer so as to correspond to the first electrode, and which applies a voltage between the first and second electrodes and plasmatizes part of the gas to generate an air current,
- the method comprising
- forming at least one of the first and second electrodes and the dielectric layer on the base member by using a coating process.
Dependencies are inferred from the claim text.